Multi-axis nanopositioning controllers and piezo electronics

Nanopositioning Controllers: Multi-Axis Digital & Analog

Digital servo controllers, analog piezo drivers, modular controller racks and real-time interface modules for multi-axis nanopositioning systems.

Digital piezo servos provide advantages when high positioning linearity, repeatable scan behavior and flexible tuning are important. This is especially useful when load conditions change or when different motion profiles need to be optimized for minimum settling time or tracking accuracy.

Analog piezo servos are often the practical choice when very low noise, fast response and attractive cost are the main requirements. PI multi-axis nanopositioning controllers are available in digital and analog architectures, with options for capacitive sensors, strain gauge feedback, high-bandwidth analog control and trigger synchronization.

Digital Servo Controllers

Best suited for systems requiring software-configurable servo parameters, trajectory control, linearization, wave generation, external triggering and frequent changes in motion profiles.

Analog Controllers & Piezo Drivers

Useful for low-noise positioning, fast command response, cost-sensitive multi-axis systems and applications where simple analog control signals are preferred.

Selection help: All PI piezo nanopositioning controllers include servo tuning options such as notch filters. For detailed comparison criteria, see the controller selection PDF or review single-axis controllers.
Multi-Axis Digital Controllers

E-727 3-Axis High-Performance Digital Piezo Nanopositioning Controller

E-727 3-axis high-performance digital piezo nanopositioning controller

The E-727 is a high-performance digital nanopositioning controller for piezo stages with up to three axes. High-power amplifiers support dynamic operation and scanning with high-capacitance piezo drives and longer travel ranges.

A 32-bit DSP processor supports a 20 kHz servo rate, while low-noise 24-bit DACs help provide high position resolution. Digital I/O lines support triggering and synchronization with external events; analog control inputs are optional.

  • Cost-optimized for 3-axis applications
  • 32-bit floating-point DSP, 20 kHz sampling rate and 24-bit DACs
  • Software-configurable parameters with changes on the fly
  • For nanopositioning systems with capacitive feedback
  • Ethernet, USB and RS-232 communication interfaces
  • Optional high-speed parallel I/O interface
  • Digital I/O lines for trigger functions
  • Additional high-bandwidth analog control / sensor input
  • 4th-order polynomial linearization for mechanics and electronics
  • Optional Dynamic Digital Linearization for improved dynamic accuracy
  • ID-chip capability for controller and mechanics interchangeability
  • Flexible wave generators and extensive software support

PDF Brochure | Specs, Drawings, Request Information

Modular Digital Piezo Nanopositioning Controllers

E-713 Ultra-High Performance Digital Piezo Nanopositioning Controller: Modular System for up to 16 Logical Axes

  • Digital controller architecture for demanding multi-axis applications
  • 50 kHz servo update rate and ultra-high-stability 20-bit D/A converter
  • Real-time operating system for coordinated trajectory control
  • Modular design for customized system configurations
  • ID-chip capability for interchangeability of controller and piezo mechanics
  • Ethernet, USB and RS-232 interfaces
  • Optional high-bandwidth analog control inputs and outputs

The E-713 high-end digital piezo nanopositioning controller is designed for demanding accuracy and dynamic-performance requirements in multi-axis precision positioning systems. Its real-time operating system supports coordinated servo control of serial and parallel-kinematic systems.

E-712 high-performance modular digital piezo controller

The interface provides several communication options, from Ethernet and USB to parallel real-time control. Optional high-resolution analog I/O supports external analog sensor signals, control signals and external amplifiers.

Specs, Drawings, Request Information

Chassis and Basic Modules

Real-Time Analog Interface Module

E-712 real-time analog interface module
  • Powerful FPGA
  • Smallest possible latency
  • Command and read position in real time
  • Integrated self-testing
  • 4 analog inputs and 4 analog outputs
  • 20-bit DACs and 18-bit ADCs

PDF Brochure

Real-Time Digital Parallel-I/O Interface Modules

E-712 real-time digital parallel I/O interface modules
  • Fast communication with 500 ns read and 1200 ns write
  • Optional real-time operating system
  • 32-bit resolution
  • Configured for up to 6 axes

PDF Brochure


Feedback Sensor Modules

E-712 feedback sensor modules for capacitive and incremental sensors
  • For capacitive dual-plate sensors, single-plate sensors or incremental sensors
  • Configured for up to 6 axes
  • Flexible choice of sensor analysis

PDF Brochure

High-Power & Low-Noise Piezo Amplifier Modules

E-712 high-power and low-noise piezo amplifier modules
  • High stability and low noise
  • Low-voltage, mid-voltage and PiezoWalk / NEXLINE motor options
  • 4 channels

PDF Brochure

Analog Multi-Axis Nanopositioning Controllers

E-664 XYZ Piezo Nanopositioning Controller for P-611.3S NanoCube Systems

E-664 XYZ piezo nanopositioning controller
  • Position servo control with notch filter for higher bandwidth and stability
  • High-bandwidth analog control interface, 0 to 10 V, and manual control
  • 3 integrated amplifiers with 14 W peak power
  • 3 displays for position and voltage

The E-664 is a 3-axis nanopositioning controller and driver for the P-611.3S NanoCube XYZ nanopositioning system. Three integrated low-noise amplifiers and strain gauge sensor control electronics allow closed-loop position resolution down to 2 nm and dynamic operation.

PDF Brochure | Specs, Drawings, Request Information

E-545 3-Channel Piezo Nanopositioning Controller for PInano® Piezo Microscope Stages

  • TCP/IP, USB and RS-232 interfaces
  • Low-noise 24-bit D/A converters
  • 3 channels
  • Linearization for piezoresistive sensors
  • Notch filter for higher bandwidth
  • 3 x 14 W peak power
  • Wave generator with programmable trigger I/O

The E-545 nanopositioning controller was designed for PInano® XY and XYZ piezo stage series for super-resolution microscopy. It provides digital and analog interfaces plus broad software support.

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E-545 3-channel piezo nanopositioning controller

E-536 3-Axis Piezo Nanopositioning Controller for P-363 PicoCube Systems: High Dynamics & Picometer Resolution

E-536 3-axis piezo nanopositioning controller
  • Ultra-low noise for picometer positioning
  • 3 x 100 W peak power
  • ±250 V output voltage
  • Optional computer interface and display module

The E-536 picopositioning controller uses three ultra-low-noise amplifiers for piezo shear actuators. The controller is designed for high-speed, high-performance PicoCube XY(Z) piezo stages in dynamic and static applications.

PDF Brochure | Specs, Drawings, Request Information

E-616 Nanopositioning Controller for Piezo Steering Mirrors and Tip/Tilt Platforms

  • Compact and cost-effective design
  • 3 x 10 W peak power from integrated amplifiers
  • Internal coordinate transformation for tripod parallel-kinematic designs
  • Closed-loop control with strain gauge sensors

The E-616 nanopositioning controller is designed for piezo-based tip/tilt platforms and steering mirrors. It can drive tripod tip/tilt + Z designs as well as quad differential tip/tilt stages. Integrated coordinate transformation simplifies operation for imaging, tracking, laser beam steering and stabilization.

PDF Brochure | Specs, Drawings, Request Information

E-616 nanopositioning controller for tip tilt mirrors
Modular Analog Nanopositioning Controllers

E-500 & E-501 Modular Piezo Nanopositioning Controller

E-500 modular analog nanopositioning controller
  • 1-, 2- and 3-axis standard configurations; custom systems up to 12 axes
  • 19-inch rack and 9.5-inch versions
  • Amplifier modules from 14 to 400 W peak power and 130 V to 1000 V
  • Servo-control modules for strain gauge and capacitive sensors
  • Choice of PC interface and display modules

The E-500 / E-501 rack is a flexible modular piezo controller system. Amplifier modules, interface modules, sensor modules and servo controller modules allow the system to be adapted to a wide range of applications. Up to 12 channels fit in one rack.

PDF Brochure | Specs, Drawings, Request Information

Modules for E-500 / E-501 Rack

E-509 Analog Servo Controller Module / Sensor Signal Conditioner

E-509 analog servo controller module
  • Position servo controller for piezo nanopositioning systems
  • Choice of strain gauge or capacitive position sensor
  • 1-, 2- and 3-channel versions
  • Eliminates drift and hysteresis; increases piezo stiffness
  • Notch filter for higher bandwidth
  • ILS circuitry maximizes capacitive sensor linearity

PDF Brochure | Specs, Drawings, Request Information

E-517 Digital Interface Module, Wave Generator, Data Recorder, Display

E-517 digital interface module and display
  • TCP/IP, USB and RS-232 digital interfaces
  • Extensive software support
  • Integrated wave generator and data recorder
  • Low-noise 24-bit DACs, 25 kHz sample rate
  • 6-digit display for voltage and position
  • 1- and 3-channel versions
  • Wave generator with programmable trigger I/O

PDF Brochure | Specs, Drawings, Request Information


E-505 High-Power Single-Channel Piezo Amplifier Module

E-505 high-power single-channel piezo amplifier module
  • Low noise and high linearity
  • 200 W peak power
  • -20 to +120 V output voltage range

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E-503 3-Channel Piezo Amplifier Module

E-503 3-channel piezo amplifier module
  • Low noise and high linearity
  • 3 x 14 W peak power
  • -20 to +120 V output voltage

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E-504 High-Power, Energy-Recovery Piezo Amplifier Module

E-504 high-power energy-recovery piezo amplifier module
  • Very energy efficient through energy recovery
  • 280 W peak power
  • 100 W average output power
  • -30 to +130 V output voltage range

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E-506 Piezo Amplifier with Charge Control for High Dynamics & Linearity

E-506 linearized piezo amplifier with charge control
  • Linearized amplifier with charge control compensates for hysteresis
  • 280 W peak power
  • -30 to +130 V output voltage

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Need Help Matching a Controller to a Stage?

Review the controller selection criteria or compare with single-axis controllers.

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Single-axis nanopositioning controllers