Long Travel Piezo Nanopositioning Stages

• Long travel up to 52 mm
• PiezoWalk precision linear motor: self-locking at rest, no heat generation and no servo dither
• Low-profile design, only 20 mm high
• 0.5 nm resolution high-precision linear encoder
• Continuous stepping mode and high-dynamics analog mode for up to 30 pm resolution
• Force generation to 75 N

The N-664 / N-565 / N-332 stage family combines long linear travel with the fine resolution of PiezoWalk motor technology. It is well suited for ultra-precision motion and positioning tasks where compact design, high stability and nanometer-class motion are required.

• Positioning range to 1.8 mm
• High precision, yet cost efficient
• Resolution to 0.1 nm
• Direct metrology and capacitive feedback for high stability and linearity
• Frictionless, high-precision flexure guiding system
• Outstanding lifetime due to PICMA^® piezo actuators
• X, XY, Z and XYZ versions
• Vacuum versions available

PIHera^® long-travel piezo stages provide positioning ranges to 1800 µm. Despite their long travel, the units are compact and provide rapid response, high guiding precision and stable closed-loop operation.

• Compact, Open and Closed Loop Versions
• Travel ranges up to 1000 µm
• High stiffness
• Frictionless flexure motion amplifier
• Fast response for precision adjustment
• Designed for OEM integration

Motion amplified flextensional piezo nanopositioning actuators are based on a frictionless, high-efficiency flexure motion amplifier and provide large travel ranges up to 1 mm with high stiffness and very fast response.

• Ironless, non-cogging direct-drive motors
• Up to 3m/sec max. velocity
• Reliable execution of nanometer-size increments
• Fast settling to nanometer precision
• Absolute encoder options
• Sub-nanometer encoder option
• Excellent velocity control

These linear motor-driven nanopositioning stages integrate non-contact motors and non-contact absolute measuring encoders for fast, precise and wear-free linear motion.

• 6-axis piezo positioner
• PiezoWalk motors
• Travel ranges: 10 mm linear, 6° rotation
• 202 mm / 8 inch clear aperture
• Non-magnetic design
• Nanometer resolution
• Low-profile design, 140 mm height
• Parallel kinematics for higher dynamics and better multi-axis accuracy
• Up to 500 N force generation
• Self-locking at rest, no heat generation

This non-magnetic 6-axis positioner combines the advantages of the parallel-kinematic hexapod approach with the precision and stiffness of NEXLINE^® PiezoWalk linear motors. It can handle large loads and automatically locks the position when powered off.

• 800 x 800 x 200 µm linear range, up to 10 mrad rotation
• For surface metrology, scanning and positioning in all six degrees of freedom
• Parallel kinematics and parallel metrology for high responsiveness and multi-axis precision
• Direct metrology with capacitive sensors for high stability and linearity
• Long lifetime PICMA^® piezo multilayer actuators
• Active trajectory control in all 6 degrees of freedom

This highly accurate custom 6-axis scanning and positioning system based on piezo flexure drives. It provides a linear travel range of 800 x 800 x 200 µm and rotation ranges up to 10 mrad.

• Hybrid piezo + servo drives combine long travel with nanometer precision
• Exceptional responsiveness and smoothness
• Reliable execution of nanometer-size increments
• Millisecond settling time to nanometer precision
• Sub-nanometer resolution feasible
• Frictionless piezo drive combined with flexure-decoupled ballscrew mechanics
• Active compensation of backlash and stick/slip effects
• Excellent velocity control

The PI hybrid nanopositioning concept combines the long positioning ranges and high holding forces of servo-motor/ballscrew stages with the high resolution and fast response of piezo drives. This concept is used in precision actuator systems for demanding applications such as the ELT telescope mirror segment alignment.