Linear Nanopositioning Stage Overview

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XY Stages

XYZ Stages

Z & Tip/Tilt Stages

6-Axis Stages

These linear nanopositioning stages provide resolution down to and below 1 nanometer. Several types are available: flexure guided stages for applications that require the highest guiding precision and fastest response, piezo-motor driven stages for longer travel ranges and hybrid stages that combine the advantages of conventional long-travel positioning systems with the precision of piezo-flexure mechanisms. Air bearings, like flexure guides, also provide friction-free, zero-wear motion, but with much larger travel ranges. PI offers a line of air bearing linear slides for precision nanometer precise positioning and scanning applications.

Air Bearing XY Tables are also available from PI.

A-142 Compact Air Bearing Linear Nanopositioning Slide with Linear Motor

Ideal for Alignment, Imaging and Scanning
Zero Wear, High Dynamics
10mm Travel
5 nm Sensor Resolution
XY and XYZ Combinations
Zero Maintenance, No Particle Generation, Ideal for Clean Room
More comapct Air Bearing Nanopositioning Slides

The A-142 air bearing linear slide provides a compact nanopositioning solution for linear precision motion, in semiconductor, medical, photonics and imaging and scanning applications. Despite the compact dimensions, 10mm travel is available, and XY and XYZ liner stage combinations are also available. The integrated voice coil linear motor provides 2G acceleration and up to 450mm/sec velocity.

Air Bearing Linear Nanopositioning Slide Datasheet, Drawings, Order Info


Video: A 3-Axis Linear Stage Version of the A-142 Air Bearing Linear Slide, ideal for fast Multi-Axis Scanning and Alignment. https://www.youtube.com/watch?v=r_GDznV36-0

Low-Cost Mini Nanopositioning Stage, up to 25 mm Travel, 1 nm Resolution

Stick Slip Piezo Drive
Travel from 6 mm to 25 mm
Open and Closed Loop Designs
Rotation Stages also Available

The Q-522 series mini piezo stages provide long travel ranges at a very low prics. They are based on a stick-slip piezoelectric motor drive and can be operated in both open and closed-loop with linear encoders providing 1 nanometer resolution.

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

Q-545 Compact Piezo Motorized Nanopositioning Stage : 25mm Travel

This PIShift piezo motor-driven, nanopositioning stage combines long travel and high resolution.

Up to 25 mm Travel
PIShift Piezo Motor: Self-Locking at Rest, no Heat Generation, no Servo Dither
Compact Footprint and Low Profile
High Resolution Linear Encoder (2 nanometer)

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

N-565 Piezo-Motor-Driven Stage, 13-52mm Travel

This low profile nanopositioning stage is driven by a self-clamping Piezo-Walk type linear motor. An interferometric encoder provides sub-nanometer resolution.

Interferometric Encoder: 0.5 Nanometer Resolution
Self Clamping at Rest: Extra High Positional Stability, No Heat Generation and Servo Jitter
Travel range 13, 26 and 52mm
Very Low Profile
Excellent guiding accuracy
Max. velocity 10 mm/second

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

Positioning High-Resolution Translation Stage

High-Precision Linear Motor Stages: 50 to 230mm, 1 Nanometer Resolution

Read Article / Measurements | Linear Nanopositioning Stage Datasheet, Drawings, Order Info

The V-551 Linear Motor Nanopositioning Stage family integrates non-contact motors and non-contact absolute measuring encoders.

Ironless non-cogging direct drive motor
V-max: 500 mm/sec
Reliable Execution of Nanometer Size Increments
Fast Settling Time to Nanometer Precision
Ultra-High Precision Absolute Encoder, 2nm Resolution
Sub-Nanometer Encoder Option
Frictionless Motor Drive and Optical Encoder
Excellent Velocity Control


Video: Vertical Linear Nanopositioning Stages with Piezo and Voice Coil Motors for Fast Focussing, Microscopy, Surface Metrology, Semiconductor Test, etc.

PIHera Piezo Flexure-Guided Nanopositioning Stage Family: 50�m to 1.8mm

PIHera piezo linear positioning systems feature travel ranges from 50 microns to 1.8mm. Despite the long travel the units are compact and provide rapid response and high guiding precision.

Positioning Ranges 50 to 1800 microns
High-Precision, yet Cost-Efficient
To 0.1 Nanometer Resolution
Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
Frictionless, High-Precision Flexure Guiding System
Outstanding Lifetime Due to PICMA Piezo Actuators
X-, XY-, Z-, XYZ Versions
Vacuum Versions Available

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

P-753 LISA Linear Piezo Stage & Piezo Actuator, to 38�m, High-Dynamics, High Stability

Resolution 0.05 Nanometers, Rapid Response
Versatile Design: Both Flexure Stage and Guided Actuator
Direct Metrology Capacitance Feedback for Highest Linearity & Long term Stability
Frictionless Precision Flexure System, for Ultra-Straight Motion
Long Life PICMA Piezo Actuators
Vacuum and Nonmagnetic Versions Available

P-753 LISA Linear Stage / Actuators are high-speed piezo nanopositioners to work as both stage and guided actuator. Capacitive feedback provides the highest precision and stability.

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

P-752 High Precision Nanopositioning Flexure Stage, to 35�m

0.1 nanometer Resolution, Millisecond Response
Travel to 35 microns
Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
Ultra-Straight Motion with Flexure Guidance
Long Life PICMA Piezo Actuators

P-752 piezo flexure nanopositioning systems provide rapid response with fast settling and extreme straightness and flatness and extremely low tip/tilt errors. They can be used horizontally and as Z-positioners. These stages perform especially well in Scanning Probe Microscopy and for high-speed dithering and disk drive testing applications.

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

P-750 High-Load Piezo-Nanopositioning Stage, Direct Metrology, 10kg Load, 75�m

10 kg Load Capacity
1 nanometer Lateral Guiding Precision
Resolution < 1 nanometer
Long Life PICMA Piezo Actuators
Fast Response
75 microns Positioning Range
Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
Frictionless Precision Flexure Guiding System

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

PiezoMove Low-Cost Flexure Actuator Family, for OEMs

3 Designs, Many different Models
Positioning Ranges to 1 mm (1,000 microns)
Nanometer Resolution, Closed-Loop Available
Frictionless, High-Precision Flexure Guiding System
High Dynamics and Stiffness
Long Life PICMA Piezo Actuators
Custom Designs: Non-Magnetic / Larger Travel or Faster Response
For Adaptronics, Optics, Medical, Biotech and Microfluidics Applications

These flexure piezo system actuators are lever-amplified and provide large positioning ranges to 1000 microns, fast response and high positioning accuracy in a small package.

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

P-611.1 Cost-Effective Nanopositioning Stage

Linear Nanopositioning Stage Datasheet, Drawings, Order Info

Cost Effective Design with Strain Sensors
Small Footprint 44x44 mm
Positioning Range to 120 microns
Resolution to 0.2 Nanometers
Cost-Effective Contrllers available
Long Life PICMA Piezo Actuators
Also: XY, XZ, XYZ & Z Stages

P-611.1 piezo flexure nanopositioning stages are cost effective positioners with strain gauge feedback. 1 to 3 axis configurations are available. The systems provide up to 120 microns travel with sub-nanometer resolution.

PIFOC Fast Objective Focusing Piezo Nanopositioning Vertical Stage

Compact, Light-Weight, Long Positioning Ranges to 800�m
Ideal for Fast Autofocus Applications
Clear Aperture up to 29 mm
High Performance Position Feedback Sensors: Capacitive Direct Measuring
Sub-Nanometer Resolution

PDF Brochure | Linear Nanopositioning Stage Datasheet, Drawings, Order Info

S-303 Nanopositioning High-Dynamics High-Resolution Piezo Phase Shifters

PDF Brochure | Linear Nanopositioning Stage Datasheet, Drawings, Order Info

25 kHz Resonant Frequency for Sub-Millisecond Dynamics
< 0.1 Nanometer Resolution; 3 Microns Positioning Range
Direct Metrology Option: Capacitive Sensor Option for Highest Linearity and Stability
Invar Option for Exceptional Thermal Stability
Aperture with Open-Loop Versions
Compact Size: 30 mm Diameter x 10 mm

S-303 phase shifters are very fast piezo systems based on tripod drive. They provide 3�m positiong range with angstrom size step resolution, and sub-msec response dynamics. The S-303 can be mounted in any orientation. Open- and closed-loop versions are available.