These linear nanopositioning stages provide resolution down to and below 1 nanometer. Several types are available: flexure guided stages for applications that require the highest guiding precision and fastest response, piezo-motor driven stages for longer travel ranges and hybrid stages that combine the advantages of conventional long-travel positioning systems with the precision of piezo-flexure mechanisms. Air bearings, like flexure guides, also provide friction-free, zero-wear motion, but with much larger travel ranges. PI offers a line of air bearing linear slides for precision nanometer precise positioning and scanning applications.
The A-142 air bearing linear slide provides a compact nanopositioning solution for linear precision motion, in semiconductor, medical, photonics and imaging and scanning applications. Despite the compact dimensions, 10mm travel is available, and XY and XYZ liner stage combinations are also available. The integrated voice coil linear motor provides 2G acceleration and up to 450mm/sec velocity.
Video: A 3-Axis Linear Stage Version of the A-142 Air Bearing Linear Slide, ideal for fast Multi-Axis Scanning and Alignment.
https://www.youtube.com/watch?v=r_GDznV36-0
Low-Cost Mini Nanopositioning Stage, up to 25 mm Travel, 1 nm Resolution
Stick Slip Piezo Drive
Travel from 6 mm to 25 mm
Open and Closed Loop Designs
Rotation Stages also Available
The Q-522 series mini piezo stages provide long travel ranges at a very low prics. They are based on a stick-slip piezoelectric motor drive and can be operated in both open and closed-loop with linear encoders providing 1 nanometer resolution.
This low profile nanopositioning stage is driven by a self-clamping Piezo-Walk type linear motor. An interferometric encoder provides sub-nanometer resolution.
Interferometric Encoder: 0.5 Nanometer Resolution
Self Clamping at Rest: Extra High Positional Stability, No Heat Generation and Servo Jitter
Video: Vertical Linear Nanopositioning Stages with Piezo and Voice Coil Motors for Fast Focussing, Microscopy, Surface Metrology, Semiconductor Test, etc.
PIHera Piezo Flexure-Guided Nanopositioning Stage Family: 50µm to 1.8mm
PIHera piezo linear positioning systems feature travel ranges from 50 microns to 1.8mm.
Despite the long travel the units are compact and provide rapid response and high guiding precision.
Positioning Ranges 50 to 1800 microns
High-Precision, yet Cost-Efficient
To 0.1 Nanometer Resolution
Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
Frictionless, High-Precision Flexure Guiding System
P-753 LISA Linear Piezo Stage & Piezo Actuator, to 38µm, High-Dynamics, High Stability
Resolution 0.05 Nanometers, Rapid Response
Versatile Design: Both Flexure Stage and Guided Actuator
Direct Metrology Capacitance Feedback for Highest Linearity & Long term Stability
Frictionless Precision Flexure System, for Ultra-Straight Motion
Long Life PICMA Piezo Actuators
Vacuum and Nonmagnetic Versions Available
P-753 LISA Linear Stage / Actuators are high-speed piezo nanopositioners to work as both stage and guided actuator. Capacitive feedback provides the highest precision and stability.
P-752 High Precision Nanopositioning Flexure Stage, to 35µm
0.1 nanometer Resolution, Millisecond Response
Travel to 35 microns
Direct Metrology & Capacitive Feedback for Highest Stability & Linearity
Ultra-Straight Motion with Flexure Guidance
Long Life PICMA Piezo Actuators
P-752 piezo flexure nanopositioning systems provide rapid response with fast settling and extreme straightness and flatness and extremely low tip/tilt errors. They can be used horizontally and as Z-positioners. These stages perform especially well in Scanning Probe Microscopy and for high-speed dithering and disk drive testing applications.
PiezoMove Low-Cost Flexure Actuator Family, for OEMs
3 Designs, Many different Models
Positioning Ranges to 1 mm (1,000 microns)
Nanometer Resolution, Closed-Loop Available
Frictionless, High-Precision Flexure Guiding System
High Dynamics and Stiffness
Long Life PICMA Piezo Actuators
Custom Designs: Non-Magnetic / Larger Travel or Faster Response
For Adaptronics, Optics, Medical, Biotech and Microfluidics Applications
These flexure piezo system actuators are lever-amplified and provide large positioning ranges to 1000 microns, fast response and high positioning accuracy in a small package.
P-611.1 piezo flexure nanopositioning stages are cost effective positioners with strain gauge feedback. 1 to 3 axis configurations are available. The systems provide up to 120 microns travel with sub-nanometer resolution.
PIFOC Fast Objective Focusing Piezo Nanopositioning Vertical Stage
Compact, Light-Weight, Long Positioning Ranges to 800µm
Ideal for Fast Autofocus Applications
Clear Aperture up to 29 mm
High Performance Position Feedback Sensors: Capacitive Direct Measuring
25 kHz Resonant Frequency for Sub-Millisecond Dynamics
< 0.1 Nanometer Resolution; 3 Microns Positioning Range
Direct Metrology Option: Capacitive Sensor Option for Highest Linearity and Stability
Invar Option for Exceptional Thermal Stability
Aperture with Open-Loop Versions
Compact Size: 30 mm Diameter x 10 mm
S-303 phase shifters are very fast piezo systems based on tripod drive. They provide 3µm positiong range with angstrom size step resolution, and sub-msec response dynamics. The S-303 can be mounted in any orientation. Open- and closed-loop versions are available.
Engineered Nanopositioning Systems: Key to Nanometer Sized Features
XY Stages
