Video: 5-Axis Nanopositioning Stage for Semiconductor Processing
Planar XY air bearing motion is combined with Z / ΘX / ΘY air bearing axes and an industrial motion controller.
PIMars 6-Axis Nanopositioning Stage with Piezo Flexures, 200µm / 1 mrad
- XYZ, ΘX, ΘY and ΘZ motion
- Travel ranges: 200 µm linear / 1 mrad rotation
- Parallel kinematics and direct metrology for multi-axis precision
- Closed-loop capacitive sensors for high linearity and stability
- Frictionless, backlash-free flexure guiding system
- Excellent scan flatness
- Long-lifetime PICMA® piezo multilayer actuators
- UHV vacuum option to 10-9 hPa
The 6-axis PIMars piezo flexure stage uses a parallel-kinematic design where all piezo drives act on the same moving platform. Combined with advanced digital control, the system enables highly precise coordinated motion in all degrees of freedom, with straightness and flatness in the low nanometer range.
PDF Brochure | Specs, Drawings, Request Information | E-712 Digital Controller
NanoCube© 6-Axis Compact Alignment Stage
- 500x500x500µm XYZ travel, 3° Rotation in all 3 Axes
- Parallel-kinematic design improves precision, reduces size
- User Programmable Virtual Pivot Point ideal for alignment applications
- Digital Motion Controller
- Closed-loop feedback for high accuracy and operational reliability
- Parallel-kinematic design, flexure guided design
- Wear-free and maintenance-free flexure guiding system, solid state drives, and non-contacting sensors
- Designed for photonics packaging, fiber alignment, optics positioning
This compact 6-axis nanopositioning stage was designed for optical alignment of fibers, waveguides and FAUs. It speeds up test and assembly in Silicon Photonics applications.
Video: 6-Axis Flexure-Guided Nanopositioning Stage
Six-axis nanometer-precision alignment for optics and photonics applications with 500 µm XYZ travel and 3 degrees of angular motion.
Custom 6-Axis Nanopositioning Stage, Piezo-Flexure Guided, to 800 µm
- 800 x 800 x 200 µm linear range plus tip/tilt and ΘZ rotation
- For surface metrology, scanning and positioning in all six degrees of freedom
- Parallel kinematics and parallel metrology for higher responsiveness and precision
- Closed-loop direct metrology with capacitive sensors
- Active trajectory control in all 6 degrees of freedom
- Frictionless flexure guidance and long-lifetime PICMA® piezo actuators
This highly accurate six-axis scanning and positioning system is based on amplified piezo actuators and flexure guides. It provides long travel for a piezo nanopositioner while maintaining excellent flatness, repeatability and multi-axis coordination.
Video: 6-Axis Stage for Nanopositioning in Photonics Alignment
6-DOF motorized hexapods and 3-axis piezo scanning stages provide coarse and fine positioning for automated optical alignment.
6-Axis Hexapod Stage / Custom Piezo-Hexapod, Non-Magnetic, 10 mm / 6°
- Closed-loop PiezoWalk motor drives
- Travel ranges: 10 mm linear, 6° rotation
- 202 mm (8 inch) clear aperture
- Non-magnetic design
- Nanometer resolution
- Low-profile 140 mm height
- Parallel kinematics for high dynamics and multi-axis accuracy
- Up to 500 N force generation
- Self-locking at rest with no heat generation
This custom non-magnetic 6-axis linear / rotary positioner combines the parallel-kinematic hexapod approach with the precision and stiffness of NEXLINE® PiezoWalk linear motors. The piezo drives generate no magnetic field and are not affected by external magnetic or electric fields, making the system useful for demanding research and OEM applications.
Compact UHV Hexapod Concept | Special Hexapods | PDF Brochure | More Hexapods
Custom piezo stages with larger travel ranges, faster response, vacuum compatibility or non-magnetic construction are available on request.
