Z-Nanopositioning Stages, Z-Scanners, Z/Tip/Tilt Stages
Fast, compact vertical nanopositioning solutions for objective focusing, Z-stack imaging, optical alignment, wafer inspection, metrology and precision automation.
Z-Tip-Tilt NanoPositioners
A-523 Air Bearing Z-Tip-Tilt Stage for Nano-Precision Alignment
- 5 mm Z travel, 2 degrees rotation around X and Y
- High force and load capacity
- Ironless 3-phase linear motor drive
- Nanometer and sub-microradian resolution
- Very low profile, cleanroom compatible, frictionless and wear-free
- Can be combined with XY-theta air bearing stages for low-profile 6-axis motion
This Z-tip-tilt air bearing stage combines nanometer resolution, high dynamics and load capacity in a low-profile design for optics, photonics, medical engineering and precision alignment.
P-5x8 Piezo Tip/Tilt + Z Nanopositioning Stage, High Dynamics with Large Aperture
- Closed-loop vertical / tilt range to 200 µm / 2 mrad
- Open-loop range to 240 µm / 2.4 mrad
- Parallel kinematics and metrology for multi-axis precision
- Frictionless high-precision flexure guidance
- 66 x 66 mm aperture
- Capacitive direct metrology for high linearity
P-5x8 Z/tip/tilt stages provide vertical motion and angular correction with high resolution and a large aperture for transmitted-light applications.
Custom High-Force Tip/Tilt + Z Platform with PiezoMotor Drives
- Closed-loop NEXLINE® high-force piezo walking drives
- Self-locking at rest, no heat generation
- Vacuum-compatible and non-magnetic designs available
- Parallel kinematics for dynamics and multi-axis accuracy
- 200 N load capacity
- 5 nm incremental sensors plus picometer dithering mode
This high-force multi-axis stage uses self-locking piezo motor drives to combine piezo-class precision with longer travel capability for semiconductor and optics applications.
Z-NanoPositioners and Objective Scanners
V-308 Nanopositioning Z-Stage for Objective Focusing, Voice-Coil Drive, 7 mm Travel
- 10 nm incremental motion, 1 nm sensor resolution
- 7 mm user-adjustable motion range
- High-performance voice-coil linear motor and optical linear encoder
- Adjustable integrated counterbalance up to 2.2 lb
- High-precision crossed roller bearings
V-308 PIFOC® fast objective focusing nanopositioning stages are designed for nanometer-precise, high-speed focusing over several millimeters in biotech, genome sequencing, microscopy and wafer inspection.
Specs, details, request quote
Fast nano-focusing and Z-scanning applications
PIFOC Piezo Z Objective Scanners, Closed-Loop
- Compact, lightweight objective focusing systems
- Long positioning ranges to 1000 µm
- Ideal for fast autofocus applications
- Clear aperture up to 29 mm
- Choice of piezoresistive or capacitive feedback sensors
- Sub-nanometer resolution
PI pioneered piezo flexure-guided objective focusing systems. A broad range of PIFOC models is available for microscopy, imaging and fast focus control.
PIHera Closed-Loop Piezo Z-Nanopositioning Flexure Stage Family, 50 to 400 µm
- Resolution to 0.1 nm
- Z-positioning range from 50 to 400 µm
- Accuracy to 0.02%
- Direct capacitive metrology
- Zero-backlash flexure guiding system
- Long-life PICMA ceramic-encapsulated piezo actuators
- XYZ combinations and vacuum option
PIHera piezo Z stages are compact, high-precision nanopositioning stages with non-contact capacitive direct-metrology feedback sensors for high linearity and stability.
P-611.Z Compact Closed-Loop Piezo Z-Nanopositioning Stage
- Compact 44 x 44 mm footprint
- Positioning range to 120 µm
- Resolution to 0.2 nm
- Cost-effective mechanics/electronics configurations
- Zero-backlash flexure guiding system
- Long-life PICMA actuators; XZ and XYZ versions available
These compact closed-loop piezo Z stages provide 100 µm closed-loop travel with millisecond responsiveness, nanometer resolution and long lifetime.
P-737 Closed-Loop Specimen-Focusing Piezo Z Stage / Wellplate Scanner
- Up to 0.5 mm Z-positioning range
- High-speed piezo Z motion
- Nanometer resolution
- Large aperture for specimen holders
- Compatible with manual and motorized XY microscope stages
- Millisecond responsiveness
The P-737 piezo Z stage is designed for biotech, microscopy, screening and drug-discovery research. It supports high-resolution Z-stack imaging and fast focusing, with a large aperture for well plates or specimen holders.
PInano Z Piezo Z Nanopositioning Scanner for Super-Resolution Microscopy
- Cost-effective closed-loop design with piezoresistive sensors
- 200 µm positioning range
- Fast step-and-settle from 5 ms
- Low-profile 0.8 in. / 20 mm design
- USB controller and software included
The PInano Z piezo stage is optimized for microscopy applications, fast settling and easy integration into high-resolution microscopes.
P-612.Z Compact Closed-Loop Piezo Z Nanopositioning Stage
- 100 µm positioning range
- Resolution to 0.2 nm
- Closed-loop linearity 0.2%
- Compact 60 x 60 mm footprint
- 20 x 20 mm clear aperture
- Zero-backlash flexure guidance and PICMA piezo actuator
This compact piezo Z stage is suited for light microscopy and other space-constrained applications requiring nanometer resolution and millisecond response.
P-733.Z High-Dynamics Z-Nanopositioner / Scanner with Direct Metrology
- 100 µm positioning range
- Direct capacitive metrology
- Resolution to 0.3 nm, closed-loop
- 50 x 50 mm aperture
- XY and XYZ versions available
- Vacuum option
P-733.Z stages provide sub-nanometer scanning and fast settling below 10 ms for automated scanning, focusing and Z-stack imaging applications.
Custom Piezo Z-Objective Scanner, Low-Profile, High Frequency, 75 µm Range
- Very low 15 mm profile
- Aperture for W0.8 x 1/36 in. microscope objectives
- Zero-backlash flexure guidance for focus stability and minimized runout
- Designed for high scanning frequencies
- Long-life PICMA ceramic-encapsulated piezo actuator
This low-profile piezo objective scanner is an alternative to the P-721 / P-725 family of PIFOC piezo Z nanopositioners.
Custom Vacuum Nanopositioning Stage: High Load, High Dynamics and 273 x 273 mm Aperture
- 45 µm vertical positioning range
- Direct capacitive metrology for higher precision
- High-stiffness direct drive
- Vacuum compatible to 10-6 hPa
- Long-life PICMA ceramic-encapsulated piezo actuator
This custom piezo Z stage provides a large aperture and is designed for vacuum applications.
Fast Steering Mirror Tip/Tilt Plataforms
S-340 Closed-Loop Piezo Tip/Tilt-Mirror Platform, High Dynamics, 4 mrad
- Resolution to 20 nrad
- Optical beam deflection to 4 mrad
- Differential design for position and temperature stability
- Parallel kinematics for precision and dynamics
- Single moving platform with fixed pivot point
- Sub-millisecond response
S-340 tip/tilt platforms provide dynamic rotation of the top platform in two orthogonal axes and are designed for optics up to 100 mm diameter.
S-330 High-Dynamics Piezo Tip/Tilt-Mirror Platform, Optics to 50 mm
- Resolution to 20 nrad
- Optical beam deflection to 20 mrad
- Stiff direct-drive design for fastest response
- Differential design for stability
- Parallel-kinematic design for dynamics, stability and linearity
- Closed-loop option
S-330 piezo tip/tilt platforms provide rotation ranges up to 10 mrad mechanical motion / 20 mrad optical deflection with sub-millisecond step response.
S-335 Fast Piezo Steering Mirror, to 70 mrad Deflection, Closed-Loop
- Optical beam deflection up to 70 mrad / approximately 4 degrees
- Flexure motion amplifier
- Coplanar axes and fixed pivot point
- Optional installed mirror
- Closed-loop resolution to 0.2 µrad
- Millisecond response
S-335 fast steering mirrors provide large deflection angles in a compact package based on a parallel-kinematic design with two coplanar orthogonal axes.
Custom High-Dynamics Piezo Tip/Tilt + Z Platform, Closed-Loop
- Optical beam deflection to 10 mrad
- 30 µm Z movement for path length adjustment
- Resolution to 50 nrad
- Single moving platform with fixed pivot point
- Sub-millisecond responsiveness
- For mirrors up to 25 mm / 1 in.
S-325 platforms provide high-speed tip/tilt and Z motion based on a parallel-kinematic direct-drive piezo tripod. They are designed for industrial applications with very high cycle counts.
Choosing a Z Nanopositioning Technology
| Technology | Best fit | Key advantage |
|---|---|---|
| Piezo flexure Z stages | Fast focusing, Z-stack imaging, metrology, microscopy and precision scanning | Sub-nanometer resolution, zero backlash, fast response and compact mechanics |
| Voice-coil Z stages | Nanometer focusing over several millimeters of travel | Longer motion range with smooth direct-drive response |
| Air bearing Z/tip/tilt tables | High-load alignment, wafer inspection, optics and cleanroom automation | Frictionless motion, high load capacity, no wear and excellent smoothness |
| Piezo tip/tilt mirror platforms (FSM) | Beam steering, active optics, path length adjustment and angular correction | Parallel-kinematic motion with high dynamics and precise multi-axis control |
