PI nanopositioning stages and multi-axis piezo systems

Nanopositioning Systems Overview

Linear, Z, XY, XYZ, tip/tilt, 6-axis, fast focus and fast steering mirror systems for precision motion and scanning applications.

PI is a leading supplier of piezo nanopositioning systems with decades of experience in piezo technology, precision flexure design, control electronics and system integration. PI also manufactures its own piezoceramic materials, including PICMA® multilayer piezo actuators with ceramic encapsulation for high reliability and long lifetime. Tests with the patented multilayer actuators have proven the positive effects of the ceramic encapsulation, they last typically 10 times longer than conventional polymer-coated piezos and after 100 Billion Cycles of testing were chosen for the MARS mission.

PI nanopositioning and scanning systems with frictionless flexure guidance provide major advantages over conventional bearing-based positioners. They offer fast response, high reproducibility, excellent straightness and flatness, and minimum incremental motion down to the sub-nanometer range.

Frictionless Flexure Guidance

Flexure-guided nanopositioners eliminate rolling or sliding friction, backlash and mechanical play. This improves repeatability, tracking accuracy, settling behavior and long-term stability.

Piezo Drive Technology

Piezo actuators, PiezoWalk motors and hybrid piezo / servo motor systems cover a wide range of force, travel and precision requirements, from sub-nanometer scanning to long-travel positioning.

Application range: PI nanopositioning systems are used in microscopy, photonics, semiconductor inspection, metrology, astronomy, laser beam steering, precision automation and other applications where nanometer-level motion and stability are required.
Nanopositioning Stages and Systems

Linear Stages

Linear nanopositioning stages

Single-axis piezo flexure stages for precision scanning, positioning and alignment.

Z Stages

Z nanopositioning stages and vertical scanners

Vertical nanopositioners and Z scanners for focusing, scanning and height positioning.

XY / XYZ Stages

XY and XYZ nanopositioning stages

Multi-axis nanopositioning stages for microscopy, photonics, metrology and scanning.

Tip/Tilt Stages

Tip tilt nanopositioning stages

Precision angular alignment and Z-tip/tilt motion for optics, samples and beam control.

6-Axis Stages

6-axis nanopositioning stages

Parallel-kinematic nanopositioning systems for coordinated motion in six degrees of freedom.

Actuators & Motors

Piezo motors and actuators

Piezo actuators, linear motors and long-travel piezo drives for OEM and system integration.

Fast Steering Mirrors

Fast steering mirrors and tip tilt mirrors

Piezo-driven mirrors for beam steering, stabilization, tracking and optical alignment.

Fast Focus Systems

Fast focus piezo systems

Piezo focus systems for microscopy, AFM, imaging, Z-stack acquisition and autofocus.

Controllers & Software

Nanopositioning controllers and electronics

Digital and analog controllers, piezo drivers, sensor modules and software tools.

Why Flexure-Guided Piezo Nanopositioning?

Traditional positioners with rolling or sliding bearings are limited by friction, mechanical play, guiding error and wear. Even when equipped with high-resolution encoders, they cannot always deliver the repeatability, minimum incremental motion, straightness and flatness required for demanding nanometer-level positioning tasks.

PI piezo-driven flexure nanopositioners avoid these limitations by combining solid-state piezo motion with frictionless flexure guidance. The result is fast, repeatable and highly precise motion with excellent dynamic response and long service life.

Precision, Force and Travel Range

With PI's broad range of piezo-driven solutions, precision, force and travel range are no longer mutually exclusive. PiezoWalk motors provide high holding forces and long travel, while hybrid piezo / servo motor systems can provide travel ranges up to 100 mm while maintaining nanometer-scale minimum incremental motion.

Need Help Selecting a Nanopositioning System?

Start with the product categories above or review multi-axis nanopositioning controllers for matched electronics, drivers and software.

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