XY Stages for Nanopositioning / Linear XY Stages
Piezo flexure XY nanopositioners, ultrasonic piezo motor stages, linear motor XY tables and air bearing planar stages for microscopy, photonics, metrology and precision automation.
High precision XY positioning stages (XY tables) can be based on several drive and bearing principles. PI provides nanopositioning XY stages with linear motors, air bearings, ultrasonic piezo motors and piezo flexure drives. Planar closed-loop XY tables with linear motors use nanometer-class linear encoders, while piezo flexure XY stages are optimized for sub-nanometer precision and fast scanning over smaller travel ranges.
Typical applications include semiconductor manufacturing, nanotechnology, bioengineering, laser processing, microscopy, surface metrology and photonics alignment. For long travel in the meter range, air bearings and linear motors are often the best choice. For compact, frictionless and very high-resolution scanning, piezo flexure nanopositioners are usually the better fit.
Video: XY Table with Air Bearings and Linear Motors
Video: How Piezo Flexure XY Tables Work
Video: Fast Linear Motor XY Table in Photonics Alignment Application
Piezo Nanopositioning Linear XY Stage with High-Stability Piezo Linear Motors, 128 x 86 mm Travel
- Closed-loop ultrasonic piezo motors provide excellent stability
- Piezo scanner options for Z and XY
- High speed to 150 mm/sec
- Travel to 128 x 86 mm
- Linear encoder
- Self-locking at rest
- Compatible with PI piezo nanopositioning and scanning stages
These long-travel XY microscope stages use ultrasonic piezo motors. The self-locking drive principle provides very high stability at rest and makes the stage useful as a stable base for piezo scanning systems.
XY Ultrasonic Piezo Motor Stage Datasheet, Drawings, Order Info
U-760 XY Microscope Stage with Ultrasonic Linear Motor
- Stable platform for P-545 PInano piezo nanopositioning systems
- Closed-loop ultrasonic motors provide excellent stability
- Self-locking at rest
- 25 x 25 mm travel range
- Low 30 mm profile for easy integration
- For Nikon, Zeiss, Leica and Olympus microscopes
The U-760 microscope XY table provides motorized long-travel motion and a stable base for high-resolution piezo scanning systems.
XY Nanopositioning Stage, Piezo-Flexure Guided, to 1.8 mm Travel
- To 1800 µm scanning / positioning range
- High-precision, cost-efficient design
- Capacitive sensors for high linearity and resolution
- Frictionless high-precision flexure guiding system
- 0.02% positioning accuracy
- PICMA long-life ceramic encapsulated piezo actuators
- X, XY, Z and XYZ versions
- Vacuum option
PIHera XY piezo positioning stages provide unusually long travel for flexure-guided closed-loop multi-axis nanopositioners. Direct-metrology capacitive feedback provides nanometer-range positioning precision.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
P-612 XY Piezo Nanopositioning Stage with Aperture, 100 x 100 µm
- 100 x 100 µm closed-loop scanning / positioning range
- Small 60 x 60 mm footprint with 20 x 20 mm aperture
- Parallel kinematics for enhanced responsiveness
- PICMA long-life ceramic encapsulated piezo actuators
- For cost-sensitive applications
- Frictionless EDM-cut flexure guiding system
The P-612.2SL is a compact flexure-guided XY piezo stage with strain gauge feedback sensors for nanometer-range resolution and millisecond response time. A matching Z positioner is also available.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
P-734 Ultra-Low Runout XY Piezo Nanopositioning Stage, 100 x 100 µm
- Ultra-precision trajectory control for scanning microscopy and surface metrology
- Parallel kinematics and metrology for fast response and multi-axis precision
- Capacitive parallel metrology compensates guiding errors
- Frictionless EDM-cut flexure guiding system
- 100 x 100 µm scanning / positioning range
- Capacitive sensors for high linearity
- Resolution below 0.4 nm
- PICMA long-life ceramic encapsulated piezo actuators
P-734 low-bow XY piezo stages confine motion to the XY plane and reduce Z runout to a few nanometers. That trajectory precision is important for AFM and high-precision surface metrology.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
P-733 XY Piezo Nanopositioning Stage with Aperture for Microscopy
- 100 x 100 µm standard scanning / positioning range; XYZ version available
- Direct-drive high-speed versions for particle tracking
- Capacitive sensors provide resolution to 0.1 nm
- Parallel kinematics for multi-axis accuracy and dynamics
- Capacitive parallel metrology compensates guiding errors
- Frictionless EDM-cut flexure guiding system
- Vacuum and non-magnetic versions
The P-733 XY piezo positioner is available in long-travel and ultra-high-dynamics direct-drive versions. A related XYZ version adds high-speed Z motion to compensate unwanted out-of-plane motion during XY scanning.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
PInano XY Piezo Scanning Stage for SR Microscopy, 200 x 200 µm
- 200 x 200 µm scanning / positioning range
- Direct-drive version for higher dynamics
- Choice of piezoresistive or capacitive sensors
- PICMA long-life ceramic encapsulated piezo actuators
- Economical system with high-performance controller
PInano low-profile XY piezo microscope scanning stages are optimized for high-resolution microscopy. They provide a low 20 mm profile and a large aperture for Petri dishes and microscope slide holders.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
P-611 2-Axis Nanopositioners: Compact XY and XZ Piezo Stages
- Cost-effective piezo mechanics and controller system solution
- Strain gauge sensor versions and open-loop versions
- 120 x 120 µm scanning / positioning range
- Small 44 x 44 mm footprint
- Frictionless EDM-cut flexure guiding system
- PICMA long-life ceramic encapsulated piezo actuators
- XYZ, X and Z systems available
P-611 compact 2-axis nanopositioners provide economical high-resolution motion in a very small package for microscopy, alignment and OEM applications.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
P-517 / P-527 Multi-Axis Piezo Scanner to 200 x 200 µm + Rot-Z
- To 200 µm scanning / positioning range
- Sub-nanometer resolution
- Frictionless high-precision flexure guiding system
- Capacitive sensors for highest linearity
- Parallel kinematics and metrology for response and multi-axis precision
- PICMA long-life ceramic encapsulated piezo actuators
These piezo positioning stages are available in multiple versions with linear travel ranges to 200 µm per axis and rotation to 4 mrad. The 66 x 66 mm aperture is well suited for microscopy and transmitted-light applications.
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
Custom Low-Profile XY Nanopositioning System with 80 x 80 mm Aperture
- 100 x 100 µm and 200 x 200 µm scanning / positioning ranges
- Direct-drive option for higher dynamics and tracking
- Ultra-low 16.5 mm profile with 80 x 80 mm aperture
- Parallel kinematics and metrology for multi-axis precision
- Capacitive parallel metrology compensates guiding errors
- Choice of strain gauge or capacitive sensors
These piezo positioning and scanning stages combine a large 80 x 80 mm aperture with a very low 16.5 mm profile. Matching Z and Z-tip/tilt stages with the same footprint are available.
Custom Low-Cost OEM XY Piezo Scanner for Imaging, 4 x 4 µm
- Highly cost-efficient high-bandwidth design
- For pixel sub-stepping and image-resolution enhancement
- 4 x 4 µm scanning / positioning range
- Compact 40 x 60 x 7 mm package
- Parallel kinematics for higher dynamics and accuracy
This compact XY piezo scanner is designed for imaging, scanning and pixel sub-stepping applications where small amplitudes and high dynamics are required.
Custom XY(Z) High-Bandwidth Piezo Stage, Picometer Precision
- 20 picometers resolution, less than 1 nm hysteresis
- Ultra-high-performance scanner for AFM / SPM
- Very high bandwidth without servo lag
- Compact manipulation tool for bio- and nanotechnology
- High resonant frequency: 11 kHz Z, 4.0 kHz X/Y
- 1 µm travel range
This custom XY / XYZ nanopositioning stage uses a crystalline lead-free piezoelectric material for very high motion linearity and precision without feedback sensors or closed-loop servo control.
Custom XY Piezo Scanner for AFM and Scanning Probe Microscopy
- 20 picometers resolution, less than 1 nm hysteresis
- Ultra-high-performance scanner for AFM / SPM
- Closed-loop with direct-metrology capacitive sensors
- Compact manipulation tool for bio- and nanotechnology
- High resonant frequency around 4.0 kHz
- 5 x 5 µm class travel
This custom XY / XYZ compact, high-bandwidth nanopositioning stage was designed for scanning probe microscopy and nanomanipulation. Capacitive feedback supports extremely fine closed-loop positioning.
Custom Low-Profile XY Piezo Scanner with Aperture, 20 x 20 µm
- For pixel sub-stepping and image-resolution enhancement
- 6 mm low profile with clear aperture
- Cost-effective OEM design
- To 20 x 20 µm scanning / positioning range
- Parallel kinematics for higher dynamics and accuracy
- Frictionless EDM-cut flexure guiding system
Low-profile piezo XY scanning tables support high-dynamic scanning, tracking and image-enhancement methods where motion amplitudes are only a few microns and settling time matters.
Custom High-Dynamics XY Piezo Scanner, 15 x 15 µm OEM Stage
- For pixel sub-stepping and image-resolution enhancement
- Highest dynamics with direct piezo drive
- Cost-efficient OEM design
- 15 x 15 µm scanning / positioning range
- 5 N load capacity
- Frictionless EDM-cut flexure guiding system
This XY piezo positioning system is a cost-effective solution for OEM imaging, scanning and tracking applications. It provides a large aperture and long-life PICMA piezo actuators.
Custom XY-Theta-Z Piezo Stage, 3 Degrees of Freedom in the XY Plane
- 250 x 250 µm XY range and 16 mrad theta range
- Frictionless high-precision flexure guiding system
- High stiffness greater than 1 N/µm
- PICMA long-life ceramic encapsulated piezo actuators
This compact multi-axis piezo positioner provides XY motion and rotation around the Z axis in a compact 60 x 60 x 100 mm package.
Custom XY Piezo Nanopositioning Stage with Active Z Compensation
- Compact, lightweight long-travel piezo positioner
- Designed for surface metrology and AFM applications
- 800 x 800 µm travel class
- Active Z axis for real-time runout compensation
- Nanometer-class flatness over long travel ranges
This XY piezo positioner uses an active Z axis to improve flatness down to the nanometer range over large XY travel, supporting surface metrology and AFM tasks.
Match Travel, Precision, Dynamics and Bearing Technology to the Application
The best XY stage technology depends on the required travel range, positioning resolution, flatness, payload, speed, duty cycle and operating environment. No single XY stage design is best for every application. Piezo flexure stages, ultrasonic piezo motor stages, linear motor stages and air bearing stages each solve a different motion problem.
Choose Piezo Flexure XY Stages When...
- Sub-nanometer resolution and very smooth scanning are required
- Travel is typically in the micrometer to low millimeter range
- Friction, backlash and mechanical wear must be avoided
- Fast step-and-settle or high-dynamic scanning is important
- Applications include AFM, microscopy, surface metrology, super-resolution imaging and nanomanipulation
Choose Ultrasonic Piezo Motor XY Stages When...
- Longer travel is required, but compact size and stability still matter
- The stage must hold position without servo heat or drift
- Self-locking at rest is an advantage
- The stage serves as a stable long-travel base for piezo scanners
- Applications include microscopy, sample positioning and precision alignment
Choose Linear Motor XY Stages When...
- High speed, high throughput and longer travel are required
- Continuous motion or fast point-to-point positioning is needed
- Nanometer-class encoder feedback is required over larger motion ranges
- The application can tolerate mechanical bearings or uses precision crossed-roller guidance
- Applications include automation, photonics alignment, inspection and test systems
Choose Air Bearing XY Stages When...
- Ultra-smooth, noncontact motion is required over long travel
- Straightness, flatness and repeatability are critical
- Particle generation, friction and bearing wear must be minimized
- The system can support clean air or nitrogen supply requirements
- Applications include wafer inspection, metrology, laser processing and semiconductor automation
Quick Selection Guide
- Smallest motion / highest resolution: piezo flexure XY stage
- Fast scanning over short travel: piezo flexure XY scanner
- Stable microscope positioning: ultrasonic piezo motor XY stage
- Long travel with high speed: linear motor XY stage
- Best straightness and smoothness: air bearing XY stage
- Highest throughput automation: linear motor or air bearing XY table
- Cleanroom / low particle motion: air bearing XY stage
- Compact OEM scanner: piezo flexure or custom piezo XY design
As a rule of thumb: use piezo flexure stages for the smallest and most precise motion, ultrasonic piezo motor stages for stable compact long-travel positioning, linear motor stages for speed and throughput, and air bearing stages when long-travel smoothness, flatness and noncontact motion are the main requirements.
Choosing an XY Nanopositioning Stage
For short travel and sub-nanometer scanning, compare piezo XY nanopositioning stages. For long travel, high throughput and larger payloads, consider linear motor or air bearing XY tables.
