 XYZ Stages Single Axis Stages 6-Axis Stages Tip/Tilt Stages |
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High precision XY-tables can be based on different operating principles. PI provides nanopositioning XY-tables with linear motors and/or air bearings, and also with piezoelectric drives. Planar closed-loop XY-tables with linear motors come with nanometer-class linear encoders (absolute and incremental). Piezo Flexure XY nanopositioning stages are based on a different principle (see video) than motorized 2-axis precision positioning stages. Piezo flexure 2-axis stages are often used, where sub-nanometer precision is required, as well as high velocity scanning over smaller travel ranges. Applications are found in high tech markets (semicondutor manufacturing, nano-technology, bio-engineering, laser technology, etc). These markets continue to demand motion systems with higher speed and accuracy in a smaller package, and new technologies are required to keep pace. Until recently, the travel range of piezo-based nanopositioners was rather limited, but progress in piezo ceramic actuator and motor design, as well as control technologies, has solved this problem and users have a wide selection of piezo based technologies to choose from. When long travel in the meter range is required, air bearings and linear motors are the best choice.
Explore more: Ultra-High-Precision Linear XY-Tables with Air Bearings.
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Video: How Piezo Flexure XY-Tables Work and why PI Nanopositioning Stages are Better |
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Piezo Nanopositioning Linear XY Table with High-Stability Piezo Linear Motors, 225x85mm Travel |
These long-travel XY microscope stages are equipped ultrasonic piezo motors. The self-locking property ensures significantly higher stability than conventional linear motors.
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PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
Video: Fast Linear Motor XY-Table in Photonics Alignment Application |
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XY Nanopositioning Stage, Piezo-Flexure Guided, to 1.8mm Travel |
PIHera's XY piezo positioning stages provide long travel ranges to 1.8mm, a record for piezo flexure actuated closed-loop multiaxis positioners. They are equipped with direct-metrology capacitive feedback for precision in the nanometer range.
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PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
P-612 XY Piezo Nanopositioning Stage with Aperture, 100x100µm, For Cost-Sensitive Applications |
The P-612.2SL XY piezo positioning stage is a flexure guided compact system featuring a compact size of only 60x60x18mm and a 20x20 mm aperture. It is equipped with cost-effective strain gauge feedback sensors providing nanometer-range resolution and millisecond response time. A vertical positioner (piezo-Z stage) is available as the P-612.ZSL.
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PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
Low-Cost OEM XY Piezo Scanner for Imaging, 4x4µm |
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This extremely cost effective XY Piezo scanner was designed for imaging & scanning applications, pixel sub-stepping, where small amplitudes but high dynamics are required PDF Brochure |
P-313 PicoCube XY(Z) High Bandwidth Piezo Stage: Picometer Precision,
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The P-313 PicoCube XY/XYZ nanopositioning stage is based on a crystalline, leadfree piezoelectric material which differs from classical PZT ceramics. PicoCube features a particularly high motion linearity enabling ultra-high precision positioning without feedback sensor and closed-loop control. It is ideal for applications which combine high dynamics, small travel and high precision requirements. PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
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P-363 PicoCube XY Piezo Scanner for AFM, Scanning Probe Microscopy 5x5µm |
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The P-363 PicoCube' XY/XYZ is a compact and rugged high-bandwidth nanopositioning stage providing ultra-high-performance in closed-loop operation. It is designed for scanning probe microscopy and nanomanipulation applications. Combining a stiff high-speed XY/XYZ piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback it is capable of 50 picometers resolution and below. PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
Custom Low Profile XY Piezo Scanner with Aperture, 20x20µm Cost-Effective OEM System with Low Profile |
Low profile piezo XY scanning tables can be used for high-dynamics scanning or tracking applications. They can be used for pixel sub-stepping methods for enhancing image resolution. Such tasks involve moving to specific positions in a small area (e.g. marked cells or CCD pixels) and from there following or performing motion with an amplitude of a few microns. The high stiffness allows for step & settling in the millisecond range. |
Appications Story |
P-915K High-Dynamics XY Piezo Scanner, 15x15µm Cost-Effective OEM Stage for Imaging w/ 30x45 mm Aperture |
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This XY piezo positioning system is cost-effective solution for OEM applications in the field of imaging, scanning or tracking. It provides a large aperture and is driven by the long-life PICMA piezo actuators. PDF Brochure |
P-734 Ultra-Low Runout XY Piezo Nanopositioning Stage, 100x100µm, |
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
P-734 low-bow XY piezo positioners boast an ultra-precise, flexure guides which confine motion to the XY plane and reduce Z-runout to less than a few nanometers. This trajectory precision is fundamental for AFM and the highest-precision surface metrology applications. Integrated parallel-metrology capacitive feedback provides accuracy and resolution in the nanometer and sub-nanometer range. |
P-733 XY Piezo-Nanopositioning Stage with Aperture for Microscopy, |
The P-733 XY piezo positioner comes in two versions: Long Travel (100x100µm) and a ultra-high-dynamics direct-drive version featureing 33x33µm travel. stages are fast and highly accurate nanopositioning and scanning systems. Both are equipped with parallel-metrology capacitive feedback for precision down to 0.1 nanometer. An XYZ-Version features a high-speed Z-drive that can actively compensate unwanted out-of-plane Z-motion during XY scanning motion. |
 P-733 Vacuum Compatible version PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
PInano XY Piezo Scanning Stage for SR Microscopy, 200x200µm, Large Aperture for Slides and Petri Dishes |
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PInano low-profile XY piezo microscope scanning stages are optimized high-resolution microscopy. They feature a low profile of 0.8 inches (20mm) for easy integration and a large aperture for Petri dishes and microscope slide holders.
3 Versions are available:
All versions can also be ordered for XYZ motion.
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Low Profile XY Nanopositioning System with 80x80mm Aperture |
These piezo positioning and scanning stages combine a very large aperture or 80x80 mm with an extremely low profile of 16.5 mm (0.65"). A variety of Z stages and Z-tip/tilt stages with the same footprint are also available. |
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
P-611 2-Axis Nanopositioners: XY & XZ Piezo Stages Compact & Cost Effective |
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PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
P-517, P-527 Multi-Axis Piezo Scanner to 200x200µm + Rot-Z, High-Dynamics & 66x66mm Aperture for Scanning Microscopes |
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info |
These piezo positioning stages come in 6 different versions with linear travel ranges to 200 microns per axis and rotation to 4 mrad. The 66 x 66 mm clear aperture makes them well suited for microscopy / transmitted-light applications, optical tweezers etc. Z positioners and Tip/Tilt positioners are also available, custom versions with 6 axes have been built. |
P-915K XY-Theta-Z Piezo Stage, 3 Degrees of Freedom in the XY Plane |
This compact multi-axis piezo positioner provides 250x250µm of XY motion and up to 16 mrad of rotation around the Z-axis in a very compact package of only 60x60x100 mm. |
PDF Brochure |
P-628K Long-Travel XY Piezo Nanopositioning Table with Nanometer Flatness, 800x800µm, Novel Active Z-Axis Design Provides Real Time Runout Compensation |
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This novel long-travel piezo positioner was designed for surface metrology and AFM applications. It is equipped with an active Z-axis that can improve flatness of travel down to the nanometer range and below over large travel ranges of 800x800µm. PDF Brochure |
U-760 XY Microscope Table with Ultrasonic Linear Motor |
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Motorized Microscope XY-stage datasheet |
 XYZ-tables Single Axis Stages 6-Axis Stages Tip/Tilt Stages |
