Precision XY-Tables for Nanopositioning, XY-Linear Stages

XYZ Stages     Single Axis Stages     6-Axis Stages     Tip/Tilt Stages



High precision XY-tables can be based on different operating principles. PI provides nanopositioning XY-tables with linear motors and/or air bearings, and also with piezoelectric drives. Planar closed-loop XY-tables with linear motors come with nanometer-class linear encoders (absolute and incremental). Piezo Flexure XY nanopositioning stages are based on a different principle (see video) than motorized 2-axis precision positioning stages. Piezo flexure 2-axis stages are often used, where sub-nanometer precision is required, as well as high velocity scanning over smaller travel ranges. Applications are found in high tech markets (semicondutor manufacturing, nano-technology, bio-engineering, laser technology, etc). These markets continue to demand motion systems with higher speed and accuracy in a smaller package, and new technologies are required to keep pace. Until recently, the travel range of piezo-based nanopositioners was rather limited, but progress in piezo ceramic actuator and motor design, as well as control technologies, has solved this problem and users have a wide selection of piezo based technologies to choose from. When long travel in the meter range is required, air bearings and linear motors are the best choice.

Explore more: Ultra-High-Precision Linear XY-Tables with Air Bearings.



Video: XY-Table with Air Bearings and Linear Motors: How it works




Video: How Piezo Flexure XY-Tables Work and why PI Nanopositioning Stages are Better









Piezo Nanopositioning Linear XY Table with High-Stability Piezo Linear Motors, 225x85mm Travel


These long-travel XY microscope stages are equipped ultrasonic piezo motors. The self-locking property ensures significantly higher stability than conventional linear motors.

  • Closed-Loop Ultrasonic Piezo Motors provide Excellent Stability
  • Piezo-Scanner Options for Z and XY
  • High Speed to 150mm/sec
  • Travel to 225x85mm
  • Linear Encoder
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

XY Positoining Stage

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info




Video: Fast Linear Motor XY-Table in Photonics Alignment Application









XY Nanopositioning Stage, Piezo-Flexure Guided, to 1.8mm Travel

PIHera's XY piezo positioning stages provide long travel ranges to 1.8mm, a record for piezo flexure actuated closed-loop multiaxis positioners. They are equipped with direct-metrology capacitive feedback for precision in the nanometer range.

  • To 1800Ám Scanning / Positioning Range
  • High-Precision, Cost-Efficient
  • Capacitive Sensors provide High Linearity and Resolution
  • Frictionless, High-Precision Flexure Guiding System
  • 0.02% Positioning Accuracy
  • PICMA' Long Life Ceramic Encapsulated Piezo Actuators
  • X-, XY-, Z- and XYZ-Versions
  • Vacuum Option

XY Positoining Stage

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info




P-612 XY Piezo Nanopositioning Stage with Aperture, 100x100Ám, For Cost-Sensitive Applications

The P-612.2SL XY piezo positioning stage is a flexure guided compact system featuring a compact size of only 60x60x18mm and a 20x20 mm aperture. It is equipped with cost-effective strain gauge feedback sensors providing nanometer-range resolution and millisecond response time. A vertical positioner (piezo-Z stage) is available as the P-612.ZSL.

  • 100x100 Closed-Loop Positioning / Scanning Range (130'm in Open-Loop)
  • Small Footprint 60x60mm, 20x20mm Aperture
  • Parallel-Kinematics for Enhanced Responsiveness
  • PICMA' Long Life Ceramic Encapsulated Piezo Actuators
  • For Cost-Sensitive Applications
  • Frictionless, EDM cut Flexure Guiding System

P-612 XY Stage

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info





Low-Cost OEM XY Piezo Scanner for Imaging, 4x4Ám

Piezo  Stage
  • Highly Cost-Efficient High Bandwidth Design
  • For Pixel Sub-Stepping, Image Resolution Enhancement
  • 4x4Ám Scanning / Positioning Range
  • Compact: 40x 60x7 mm
  • Parallel Kinematics= Higher Dynamics & Accuracy

This extremely cost effective XY Piezo scanner was designed for imaging & scanning applications, pixel sub-stepping, where small amplitudes but high dynamics are required

PDF Brochure




P-313 PicoCube XY(Z) High Bandwidth Piezo Stage: Picometer Precision,
No Servo Lag ideal for Scanning Probe Microscopy: 1Ám


  • 20 Picometers Resolution, <1 nm Hysteresis
  • Ultra-High-Performance Scanner for AFM/SPM
  • New Drive Concept for Very High Bandwidth w/o Servo Lag
  • Compact Manipulation Tool for Bio-/Nanotechnology
  • High Resonant Frequency 11 khz (Z) 4.0 kHz (X,Y)
  • 1Ám Travel Range

The P-313 PicoCube XY/XYZ nanopositioning stage is based on a crystalline, leadfree piezoelectric material which differs from classical PZT ceramics. PicoCube features a particularly high motion linearity enabling ultra-high precision positioning without feedback sensor and closed-loop control. It is ideal for applications which combine high dynamics, small travel and high precision requirements.

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
Piezo Nanopositioning P-313 Piezo XY Nanopositioning Stage




P-363 PicoCube XY Piezo Scanner for AFM, Scanning Probe Microscopy 5x5Ám

PicoCube
  • 20 Picometers Resolution, <1 nm Hysteresis
  • Ultra-High-Performance Scanner for AFM/SPM
  • Closed-Loop with Direct Metrology Cap Sensors
  • Compact Manipulation Tool for Bio-/Nanotechnology
  • High Resonant Frequency 4.0 kHz
  • 1Ám Travel Range

The P-363 PicoCube' XY/XYZ is a compact and rugged high-bandwidth nanopositioning stage providing ultra-high-performance in closed-loop operation. It is designed for scanning probe microscopy and nanomanipulation applications. Combining a stiff high-speed XY/XYZ piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback it is capable of 50 picometers resolution and below.

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info




Custom Low Profile XY Piezo Scanner with Aperture, 20x20Ám Cost-Effective OEM System with Low Profile


  • For Pixel Sub-Stepping, Image Resolution Enhancement
  • 6 mm Low Profile with Clear Aperture
  • Cost-Effective Design
  • To 20x20Ám Scanning / Positioning Range
  • Parallel Kinematics = Higher Dynamics & Accuracy
  • Frictionless, EDM cut Flexure Guiding System

Low profile piezo XY scanning tables can be used for high-dynamics scanning or tracking applications. They can be used for pixel sub-stepping methods for enhancing image resolution. Such tasks involve moving to specific positions in a small area (e.g. marked cells or CCD pixels) and from there following or performing motion with an amplitude of a few microns. The high stiffness allows for step & settling in the millisecond range.
Piezo Nanopositioning P-713 Nanopositioning XY Stage

Appications Story




P-915K High-Dynamics XY Piezo Scanner, 15x15Ám Cost-Effective OEM Stage for Imaging w/ 30x45 mm Aperture

Piezo XY Stage
  • For Pixel Sub-Stepping, Image Resolution Enhancement
  • Highest Dynamics with Direct Piezo Drive
  • Cost-Efficient Design
  • 15x15Ám Scanning / Positioning Range
  • 5 N Load Capacity
  • Frictionless, EDM cut Flexure Guiding System

This XY piezo positioning system is cost-effective solution for OEM applications in the field of imaging, scanning or tracking. It provides a large aperture and is driven by the long-life PICMA piezo actuators.

PDF Brochure




P-734 Ultra-Low Runout XY Piezo Nanopositioning Stage, 100x100Ám,
Low Bow Scanner with High-Dynamics & Clear Aperture

Piezo XY Stage

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
  • 2-Axis Nanopositioning Stage with Ultra-Precision Trajectory Control, for Scanning Microscopy & Surface Metrology
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Frictionless, EDM cut Flexure Guiding System
  • 100x100Ám Scanning / Positioning Range
  • Capacitive Sensors for High Linearity
  • < 0.4 Nanometers Resolution
  • PICMA' Long Life Ceramic Encapsulated Piezo Actuators

P-734 low-bow XY piezo positioners boast an ultra-precise, flexure guides which confine motion to the XY plane and reduce Z-runout to less than a few nanometers. This trajectory precision is fundamental for AFM and the highest-precision surface metrology applications. Integrated parallel-metrology capacitive feedback provides accuracy and resolution in the nanometer and sub-nanometer range.




P-733 XY Piezo-Nanopositioning Stage with Aperture for Microscopy,
100x100Ám, High Performance Stage Well-Suited for STED


  • 2-Axis Stage with 100x100Ám Standard Scanning / Positioning Range; 3-Axis XYZ Version Available
  • Direct Drive, High-Speed Versions for Particle Tracking
  • Capacitive Sensors provide Resolution to 0.1 Nanometers
  • Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Frictionless, EDM cut Flexure Guiding System
  • PICMA' Long Life Ceramic Encapsulated Piezo Actuators
  • Vacuum and Non-Magnetic Versions

The P-733 XY piezo positioner comes in two versions: Long Travel (100x100Ám) and a ultra-high-dynamics direct-drive version featureing 33x33Ám travel. stages are fast and highly accurate nanopositioning and scanning systems. Both are equipped with parallel-metrology capacitive feedback for precision down to 0.1 nanometer. An XYZ-Version features a high-speed Z-drive that can actively compensate unwanted out-of-plane Z-motion during XY scanning motion.
XY Nano Positioner


P-733 Vacuum Compatible version
PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info




PInano XY Piezo Scanning Stage for SR Microscopy, 200x200Ám, Large Aperture for Slides and Petri Dishes

PInano XY Stage
  • 2-Axis Stage with 200x200Ám Scanning / Positioning Range
  • Direct-Drive Version for Higher Dynamics
  • Choice of Sensors: PiezoResistive (Lower Cost) or Capacitive (Higher Performance)
  • PICMA' Long Life Ceramic Encapsulated Piezo Actuators
  • Economical System with High Performance Controller

PInano low-profile XY piezo microscope scanning stages are optimized high-resolution microscopy. They feature a low profile of 0.8 inches (20mm) for easy integration and a large aperture for Petri dishes and microscope slide holders.

3 Versions are available:
- Economical, long travel (200x200Ám) equipped with piezoresistive sensors
- High stability, long travel (200x200Ám) equipped with direct-metrology capacitive feedback
- High speed, for particle tracking (70x70Ám) with direct drive and piezoresistive feedback

All versions can also be ordered for XYZ motion.

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info





Low Profile XY Nanopositioning System with 80x80mm Aperture

  • 2-Axis Stages with 100x100Ám & 200x200Ám Scanning / Positioning Range
  • Direct-Drive Option for Higher Dynamics, Tracking Applications
  • Ultra-Low Profile: 16.5 mm; Large Clear Aperture 80x80mm
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • PICMA Long Life Ceramic Encapsulated Piezo Actuators


These piezo positioning and scanning stages combine a very large aperture or 80x80 mm with an extremely low profile of 16.5 mm (0.65"). A variety of Z stages and Z-tip/tilt stages with the same footprint are also available.
Piezo XY Stage

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info




P-611 2-Axis Nanopositioners: XY & XZ Piezo Stages Compact & Cost Effective

XY Stage
  • Cost-Effective Piezo Mechanics & Controller System Solution
  • Strain Gauge Sensor Versions & Open Loop Versions
  • 120x120Ám Scanning / Positioning Range
  • Small Footprint 44x44 mm
  • Frictionless, EDM Cut Flexure Guiding System
  • PICMA Long Life Ceramic Encapsulated Piezo Actuators
  • XYZ, X & Z Systems Available


PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info




P-517, P-527 Multi-Axis Piezo Scanner to 200x200Ám + Rot-Z, High-Dynamics & 66x66mm Aperture for Scanning Microscopes

XY Positioning Stage

PDF Brochure | XY Piezo Stage Datasheet, Drawings, Order Info
  • To 200Ám Scanning / Positioning Ranges
  • Sub-Nanometer Resolution
  • Frictionless, High-Precision Flexure Guiding System
  • Capacitive Sensors for Highest Linearity
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • PICMA Long Life Ceramic Encapsulated Piezo Actuators

These piezo positioning stages come in 6 different versions with linear travel ranges to 200 microns per axis and rotation to 4 mrad. The 66 x 66 mm clear aperture makes them well suited for microscopy / transmitted-light applications, optical tweezers etc. Z positioners and Tip/Tilt positioners are also available, custom versions with 6 axes have been built.




P-915K XY-Theta-Z Piezo Stage, 3 Degrees of Freedom in the XY Plane

  • 250x250Ám, 16 mrad Scanning / Positioning Ranges
  • Frictionless, High-Precision Flexure Guiding System
  • High Stiffness >1 N/Ám
  • PICMA Long Life Ceramic Encapsulated Piezo Actuators

This compact multi-axis piezo positioner provides 250x250Ám of XY motion and up to 16 mrad of rotation around the Z-axis in a very compact package of only 60x60x100 mm.
XY Theta Nanopositioning Stage

PDF Brochure




P-628K Long-Travel XY Piezo Nanopositioning Table with Nanometer Flatness, 800x800Ám, Novel Active Z-Axis Design Provides Real Time Runout Compensation

Piezo XY Stage
  • Compact, Light-Weight, Long Positioning Ranges to 1000Ám
  • Ideal for Fast Autofocus Applications
  • Clear Aperture up to 29 mm
  • Choice of Position Feedback Sensors: Piezoresistive (lower cost); Capacitive (higher precision)
  • Sub-Nanometer Resolution


This novel long-travel piezo positioner was designed for surface metrology and AFM applications. It is equipped with an active Z-axis that can improve flatness of travel down to the nanometer range and below over large travel ranges of 800x800Ám.

PDF Brochure




U-760 XY Microscope Table with Ultrasonic Linear Motor


Piezo Nanopositioning Stage
  • Stable Platform for P-545 PInano Piezo Nanopositioning Systems
  • Closed-Loop Ultrasonic Motors provide Excellent Stability
  • Self-Locking at Rest
  • 25 mm x 25 mm Travel Range
  • Low Profile for Easy Integration: 30 mm
  • For Nikon, Zeiss, Leica and Olympus Microscopes


Motorized Microscope XY-stage datasheet




XYZ-tables     Single Axis Stages     6-Axis Stages     Tip/Tilt Stages