Piezoelectric laser beam steering mirrors are based on stiff piezo actuators driving a single-axis or mulit-axis platform. These high-resolution systems can provide response times as low as 10's of microseconds and on the upper end provide tilt angles in the 100 mrad range. Multi-axis steering mirrors are based on parallel kinematic designs with 3 actuators (tripod design) or 4 actuators (differential drive). Open-loop and closed-loop designs with different feedback sensors are available. Fast steering mirrors can also be used for free space optical communication and satellite communication .
Video: Fast Laser Control Mirrors with Piezoelectric Solid State Motors and Voice-Coil Linear Motors for Beam Steering, Fiber Coupling and Free Space Optical Communication
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S-224 / S-226 Miniature Single Axis High Speed Tilt Mirror for Laser Beam Steering
Open Loop Versions (Lower Cost) and Closed-Loop Versions (Better Linearity)
Nanoradian Resolution
Extremely Fast: Microsecond Response
Up to 4.4 mrad Optical Beam Deflection
Includes BK7 Mirror
Zero Friction Flexure Guiding System
Longlife Ceramic-Encapsulated PICMA® Piezo Multilayer Actuators
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1-3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms with Clear Aperture
S-303 High-Speed Piezo Phase Shifter with Direct Metrology Option
Very High Resolution: <0.1 Nanometer Resolution
Tripod Design, Very Stiff with 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
Capacitive Sensor Option for Highest Linearity and Stability
Invar Option for Highest Thermal Stability
Aperture (Open-Loop Versions)
Travel Range to 3 microns
Compact Size: 30mm Dia X 10mm
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S-310 - S-316 Miniature Piezo Tip/Tilt + Z Scanner with Aperture
Tripod Design allows Tip/Tilt and Piston Motion
Parallel Kinematics Provides Enhanced Dynamics and Better Multi-Axis Accuracy
10 mm Clear Aperture
Optical Beam Deflection to 2.4 mrad
Piston Movement up to 12 µm (phase shifter)
Sub-Millisecond Response, Sub-Microradian Resolution
Open Loop (lower cost) & Closed-Loop Versions (Higher Precision)
High-Precision Flexure Guiding System
Longlife Ceramic-Encapsulated PICMA® Piezo Multilayer Actuators
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Specs, Drawings, Information Request
Tip/Tilt Stages with Large Aperture
P-541.Z Piezo Z and Tip/Tilt + Z Stages: Low Profile, 80x80mm Aperture
Mechanical Travel Range: 100 microns, 1 mrad Tip/Tilt
1- and 3-Axis Versions
Low Profile for Easy Integration: 16.5 mm
Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
Combination with Long-Travel M-686 Microscopy Stages
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Specs, Drawings, Information Request
P-518, P-528, P-558 Piezo Tip/Tilt + Z Stage: High-Dynamics with Large 66x66mm Aperture
1- and 3-Axis Versions
Closed-Loop Tilt Range 2 mrad; Z-Travel 200 µm
Parallel Kinematics + Metrology: Faster Response + Better Multi-Axis Precision
Frictionless, High-Precision Flexure Guiding System
Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
Clear Aperture 66 x 66 mm
Capacitive Sensors for Highest Linearity
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Specs, Drawings, Information Request
N-510 High-Force Tip/Tilt + Z Platform with PiezoMotor Drives;
Nanometer Precision for Semiconductor
NEXLINE® High-Force Piezo Walking Drives
Self-Locking at Rest, No Heat Generation
Vacuum Compatible and Non-Magnetic Designs Available
Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
200 N Load
5 nm Incremental Sensors for High Precision + Picometer Resolution Dithering Mode
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Specs, Drawings, Information Request
3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms (No Aperture)
S-325 Piezo Tip/Tilt + Z Platform: Tripod Design for Mirrors and Optics to 25 mm (1") Diameter for for Laser Beam Steering
Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
Piston Movement up to 30 µm (for Path Length Adjustment)
Compact Tripod Design with Coplanar Axes Eliminates Polarization Rotation
Sub-Millisecond Responsiveness
Closed-Loop Versions for Higher Precision
Frictionless, High-Precision Flexure Guiding System
Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure |
Specs, Drawings, Information Request
Custom Laser Beam Steering Piezo Tip/Tilt + Z Platform with Capacitive Direct Metrology: High Dynamics & Stability
Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
Piston Movement up to 30 µm (for Path Length Adjustment)
Compact Tripod Design with Coplanar Axes Eliminates Polarization Rotation
Sub-Millisecond Responsiveness
Closed-Loop Versions for Higher Precision
Frictionless, High-Precision Flexure Guiding System
Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure |
Specs, Drawings, Information Request
2-Axis (Orthogonal) Piezo Tip-Tilt Platforms
V-931 Fast Voice-Coil 2-Axis Laser Beam Steering Tip/Tilt Mirror
High Dynamic Laser Beam Steering and Free Space Communication
Can hold Mirrors to 1" Diameter
Optical Deflection Angle in Theta-X and Theta-Y to 8 Degrees
Voice-Coil Push Pull Lnear Motors
Flexure Guides - No Wear, No Friction
NEW!
Fast Laser Beam Steering Mirrors Overview
S-335 Miniature Piezo Tip/Tilt-Mirror: Long Travel to 70 mrad Deflection, for Laser Beam Steering, Optical Communication
Extremely large Tilt Angle: Optical Beam Deflection Coplanar Axes & Fixed Pivot Point; Eliminate Polarization Rotation
Factory Installed Mirror available
Millisecond Response, Resolution to 0.1 µrad
Closed-loop Position Servo-Control for High Accuracy
Frictionless, High-Precision Flexure Guiding System
Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
Specs, Drawings, Information Request
