|
Nanopositioning equipment and instrumentation plays a crucial role in applications such as microscopy, semiconductor test & manufacturing, optical alignment, bio-nanotechnology, optical scanning and high-speed / high-stability precision positioning.
PI provides a variety of different nanopositioning systems to suit different applications - high performance linear motor stages, air bearing stages, magnetic levitation systems and a variety of piezo motor technologies. Piezo flexure positioners provide a combination of speed, resolution and guiding precision that is unique and not possible with conventional motorized, mechanical positioning systems.
The piezo effect enables extremely uniform, controlled small displacements. PI piezo nanopositioning stages are flexure-guided, free of maintenance and lubricants and available in vacuum and ultra-high vacuum configurations. In addition to state-of-the-art piezo mechanisms we also design advanced digital servo piezo motion controllers and a number of position sensors providing sub-nanometer position resolution. The combination of mechanics, sensor technology and control electronics along with a wealth of software drivers and virtual instruments makes our nanopositioning systems unique. In addition to piezoelectric nanopositioning stages, PI also provides air bearing-based nanopositioning systems, equally free of friction and wear. Video: Compact XYZ Nanopositioning Stage based on Air Bearings and linear motors PI employs over 1300 staff worldwide and has 4 decades of experience with design and manufacture of precision motion control equipment. Many of our customers work at the leading edge of technology and demand the highest accuracy, quality as well as the best support. PI precision instruments are employed in automation equipment, in labs, on mountain tops and in space. Actually our positioning stages and PZT actuators are currently working in the Curiosity Rover's science lab on Mars. Talk to one of our engineers. PI has the people to understand your application, the broadest range of motion technologies and best-in-class manufacturing, assembly, process & metrology. Call or email us. |
||||||
|
| Examples of Piezo Positioning Systems: | ||||
 | ||||
| Optical Microscopy Piezo Stages, Z-Stages, Objective Nanofocusing Systems | ||||
| ||||
 |
 |
 |
||
| PInano XYZ & XY Piezo Positioning Stages for SR microscopy | A-142 Air Bearing Miniature Nanopositioning Stage w/Voice-Coil Linear Motor | High-Speed Piezo-Z Slide Scanner: Low-Profile, Low-Cost, for Super Resolution Microscopy | ||
| ||||
 |
 |
 |
||
| Z-Piezo Positioner Stage for 3-D imaging, travel to 500µm | Objective lens positioner / fast focussing system, variety of travel ranges and objective diameters | Piezo motorized XY-microscope stage with scanner insert. 25x25mm travel, fast, low profile | ||
| AFM Scanning Piezo Stages, NSOM Scanning Stages, E-Beam Scanning Stages | ||||
| ||||
 |
 |
 |
||
| PicoCube piezo nano positioning stage, picometer resolution, very small, 5x5x5µm closed-loop travel | PIMars precision positioning stage, up to 300x300x300µm travel, parallel kinematics & metrology for highest precision | P-733 piezo positioning stage, non-magnetic, vacuum version. 100x100µm travel, capacitive feedback. | ||
| Low Profile Piezo Systems (XY, Z, Z/Tip/Tilt) w/ Aperture | ||||
| ||||
 |
 |
 |
||
| 100x100µm XY Version and the 100µm x 1 mrad Z-Tip/Tilt Version | P-733.2DD and 3DD high-speed XY & XYZ precision positioning stage | Low-cost, ultra low profile XY scanner for image dithering / sub-pixel stepping | ||
| Linear Stages for Nano-Positioning | ||||
| ||||
 |
 |
 |
||
| P-611, 100µm entry level piezo positioning stage w/ strain gauge feedback | P-621.1 piezo positioning stages w/ high accuracy capacitive sensors, 60 to 1800µm positioning range. | P-752 ultra-high precision piezo positioner | ||
| Multi-Axis Piezo Positioning Stages, Z-Tip/Tilt Stages | ||||
| ||||
 |
|
 |
||
| Z & Z-Tip/Tilt piezo positioner, up to 200µm, 4 mrad, Parallel Kinematics, Capacitive Feedback | PIMars piezo precision positioning stage, up to 300x300x300µm travel, parallel kinematics & metrology for highest precision | P-611 NanoCube, NanoAlignment system, 100x100x100µm compact entry level stage w/ strain gauge feedback | ||
| 6-Axis Piezo Nanopositioning Stages | ||||
| ||||
 |
 |
|
||
| P-587 piezo positioning system. Up to 800µm / 10 mrad six-axis stage, parallel kinematics & metrology for highest precision | Piezo Hexapod. 6-axis stage, 10mm linear, 6deg rotation. 50 kg load. | PIMars ulta-high accuracy positioner, 3 & 6 axis parallel kinematics & metrology | ||
| FSM, Fast Steering Mirrors (Piezo Tip/Tilt Stages) | ||||
| ||||
 |
 |
 |
||
| S-334, tip/tilt stage / piezo steering mirror. Up to 120mrad deflection | S-330, tip/tilt stage / piezo steering mirror. Sub-millisecond responsivness, up to 20mrad deflection | S-303 piezo phase shifter. Very fast response (Fres: 25 kHz). | ||
| Flexure Actuators & Z-Piezo Positioning Stages w/o Aperture | ||||
| ||||
 |
 |
 |
||
| Flexure Guided Z-Actuator. Motion to 480µm, open and closed-loop. | PIHera Z-stage family. Motion to 400µm, capacitive feedback, very compact | P-611, 100µm low cost piezo positioner w/ strain gauge feedback | ||
| Long Travel Piezo Positioners | ||||
| ||||
 |
 |
 |
||
| P-615 NanoCube XYZ alignment stage. Motion to 350µm. E.g. for optical alignment | PIHera XY-stage positioners. Motion to 1800µm, capacitive feedback, very compact | Air Bearing stages and Hybrid Stages can provide long travel and nanometer precision | ||
| Piezo Motors / Linear Actuators | ||||
| ||||
 |
 |
 |
||
| Novel compact OEM Piezo stepping motor / actuator with sub-nanometer precision | High-force piezo stepping motor / actuator with sub-nanometer precision | High-speed piezo motor / actuator | ||
| Custom Piezo Positioning Stages | ||||
| ||||
 |
 |
 |
||
| Miniature Stage for read/write head testing | Lightweighted, high-load stage for faster response | Fast tool servo piezo stage for non-circular turning of metal parts. | ||
| Controllers & Piezo Drivers for Precision Positioners | ||||
| ||||
 |
 |
 |
||
| Digital Piezo Controller Card for precision positioners, 3 axis | Piezo motion controller for OEMs | Advanced digital controller for piezo positioners, modular, very high performance | ||
