Nano-Focus Systems Based on Piezo Drives

Paper: Fast Laser Autofocus Systems     Super Resolution Microscope Stages




Piezo based nanopositioning focus drives / objective positioners are designed for fast motion and high resolution over travel ranges typically from 100 µm to 500 µm. Their stiff piezo actuation system enables fast scanning rates and step and settle times in the low millisecond range.

A new version with a piezo walk motor is now also available for long travel ranges to 2 mm.







N-725 Nano Focus Positioner, 2 mm Travel, PiezoWalk Motor

N-725 Nanopositioning Stage with NEXLINE Drive
  • Novel Closed-Loop PiezoWalk Motor combines Long Travel, Fast Response and High Stiffness
  • High Force & High-Dynamics for Positioning and Scanning of Large Microscope Objectives up to 29 mm Ř
  • 1 mm Travel for Large Penetration Depth such as Two-Photon Microscopy
  • Very Fast Response: 20 msec Step & Settle Time
  • Self Locking at Rest, no Heat Generation, no Servojitter
  • Compact Design
  • Drive Resolution < 1 nm, 20 nm Encoder Resolution
  • Continuous Nanostepping + High-Dynamics Analog Mode
  • QuickLock Adapter for Easy Installation

N-725 PIFOC® is the first piezo-objective drive with integrated NEXACT® Piezo Linear Motor, combining smooth motion, long travel ranges and fast response with extreme position stability

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PIFOC® 400 µm Piezo Objective Nanopositioning System: Mechanics, Software & Digital Controller

  • Significantly Faster Response and Higher Lifetime than Motorized Z-Stages
  • Closed-Loop and Sub-Nanometer Resolution
  • High Performance Digital Servo Controller included; Software Configurable Parameters
  • USB, RS-232 and Analog Interfaces
  • 400 µm Positioning Range
  • Frictionless, Zero-Backlash Flexure Guides Provide Better Focus Stability
  • Digital Control & Capacitive Direct Metrology Provide Higher Linearity & Stability
  • Aperture up to 29 mm Ř, Easy Installation w/ QuickLock Adapter
  • Extensive Software Support, Compatible with MetaMorph Imaging Software
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators

The PIFOC® piezo objective scanner systems include a high precision piezo mechanism and a custom-tuned compact digital controller. This combination provides higher performance at reduced costs. The piezo mechanisms combine large travel ranges of up to 400 µm with extreme position stability. The integrated, frictionless

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PIFOC High Performance System
and stiff piezo flexure guiding system and the sophisticated digital servo, ensure high stiffness, fast response and minimal settling times. Highly parallel motion with minimum tilt improve image quality. Nevertheless, the focusing systems are extremely compact.




P-721 PIFOC® Piezo Flexure Nanopositioner & Scanner for Microscope Objectives: 140 µm


Piezo Nanopositioning Linear Scanner
  • Scans and Positions Objectives with Sub-nm Resolution
  • Closed-Loop Option
  • Millisecond Settling Time , Positioning Range to 140 µm,
  • Significantly Faster Response and Higher Lifetime than Motorized Z-Stages
  • Parallel Precision Flexure Guiding for Better Focus Stability
  • Choice of Position Feedback Sensors: Capacitive Direct Metrology (Higher Performance) or Strain Gauge (Lower Cost)
  • Compatible with Metamorph™ Imaging Software
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators
  • Easy Installation with QuickLock Adapter
  • Clear Aperture up to 29 mm Ř

P-721 PIFOCs® are high-speed, piezo-driven microscope objective nanofocusing/scanning devices, providing a positioning and scanning range of 100 µm with sub-nanometer resolution and very high motion of linearity up to 0.03%. For applications, such as the two-photon spectroscopy wich requires a particulary high resolution, there are versions wich allow a free aperture of up to 29 mm in diameter.

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P-726 PIFOC® 100 µm Piezo Objective Nanopositioner / Scanner for Heavy, High NA Objectives:


  • Extremely Stiff Design provides High-Dynamics even with Large High NA Objectives
  • 1120 Hz Resonant Frequency, 560 Hz with 210 g Load
  • Typical Settling Time about 6 ms
  • 100 Microns Positioning Range
  • Closed-Loop, Capacitive Direct Metrology Provides Higher Linearity, Stability and Dynamics
  • Resolution to 0.3 nm
  • Frictionless, Zero-Backlash Flexure Guides Provides Better Focus Stability
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators

The P-726 PIFOC® Nanofocusing system was developed to achieve the fastest possible stepping time with the heavy, high-numerical-aperture objectives used in many of today's high-resolution microscopy applications.
P-726 PIFOC Objective Scanner

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P-725.xDD PIFOC® Ultra-High-Dynamics Piezo Microscope Objectives
Nanopositioner & Scanner: 18 µm


Ultra-High-Dynamics Piezo Microscope Objectives Nanopositioner & Scanner
  • Settling Time under 5 milliseconds with Microscope Objective Installed
  • 18 µm Positioning Range
  • Sub-nm Resolution
  • Parallel Flexure Guiding for Minimized Objective Offset
  • Choice of Closed-Loop Position Feedback Sensors: Capacitive Direct Metrology (Higher Performance) or Strain Gauges (Lower Cost)
  • Compatible with Metamorph™ Imaging Software
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators
  • QuickLock Adapter for Easy Installation

The P-725.xDD objective positioners were designed for extremely fast motion over relatively short travel ranges up to 18 µm. Their ultra-stiff direct piezo drive (1.2 kHz resonant frequency) enables the highest scanning rates and response times of only 5 msecs – essential for time-critical tasks.

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P-720 PIFOC® Microscope Objective Nanopositioner & Scanner for Small Objectives


  • Positions & Scans Microscope Lenses with Sub-nm Resolution
  • Frictionless, Zero-Backlash Flexure Guides Provides Better Focus Stability
  • 100 Microns Open Loop Positioning Range
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators

P-720 PIFOCs® are high-speed, piezo-driven microscope objective nanofocusing/scanning devices which can be mounted on most microscopes. The frictionless, flexure guiding system combines high guiding precision for superior focus stability with fast response for rapid settling and scanning.
Piezo Nanopositioning Linear Actuators

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P-721K PIFOC® Nosepiece Nanopositioner for Microscope Turrets

Nosepiece Nanopositioner for Microscope Turrets

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  • Precisely Positions & Scans Microscope Turrets
  • Compact Design, Sub-Nanometer Resolution
  • Direct-Metrology Capacitive Sensors for Highest Linearity, Stability and Control Dynamics
  • Frictionless, High-Precision Flexure Guiding System for Better Focus Stability
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators





P-721K Power-PIFOC® Nosepiece Nanopositioner: High-Load Capacity, Capacitive Feedback


  • Scans and Positions Objectives with Sub-nm Resolution
  • Positioning Range to 150 µm, Millisecond Settling Time
  • Parallel Flexure Guiding for Minimized Objective Offset
  • Capacitive Direct Metrology Provides Higher Linearity, Stability and Dynamics
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators

Piezo Nanopositioning Linear Stage Nosepiece Nanopositioner for Microscopy

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P-725 PIFOC® Piezo Flexure Nanopositioner & Scanner for Microscope Objectives: 460 µm


PIFOC® Piezo Flexure Nanopositioner & Scanner
  • Positioning Range to 460 µm
  • Significantly Faster Response and Higher Lifetime than Motorized Z-Stages
  • Scans and Positions Objectives with Sub-nm Resolution
  • Closed-Loop, Capacitive Direct Metrology Provides Higher Linearity, Stability and Dynamics
  • Parallel Precision Flexure Guiding for Better Focus Stability
  • Compatible with MetaMorph Imaging Software
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators
  • Easy Installation with QuickLock Adapter
  • Clear Aperture up to 29 mm Ř

The innovative, frictionless, flexure guiding system provides enhanced precision for superior focus stability with fast response for rapid settling and scanning.

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P-915K High-Speed, Low-Profile Piezo Microscope Objective Nanopositioner & Scanner, 75 µm Positioning Range


  • For W0.8 x 1/36" Microscope Objectives
  • Frictionless, Zero-Backlash Flexure Guiding System for Better Focus Stability and Minimized Runout
  • Very Low Profile: 15 mm
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators
High-Speed, Low-Profile Piezo Microscope Objective Nanopositioner

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Paper: Fast Laser Autofocus Systems     Super Resolution Microscope Stages