Fast Steering Mirrors and Active Optics
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Piezo steering mirrors are based on stiff piezo actuators driving a single-axis or mulit-axis platform. These high-resolution systems can provide response times as low as 10's of microseconds and on the upper end provide tilt angles in the 100 mrad range. Multi-axis steering mirrors are based on parallel kinematic designs with 3 actuators (tripod design) or 4 actuators (differential drive). Open-loop and closed-loop designs with different feedback sensors are available.
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S-224 / S-226 Miniature Single Axis High Speed Tilt Mirror
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- Open Loop Versions (Lower Cost) and Closed-Loop Versions (Better Linearity)
- Nanoradian Resolution
- Extremely Fast: Microsecond Response
- Up to 4.4 mrad Optical Beam Deflection
- Includes BK7 Mirror
- Zero Friction Flexure Guiding System
- Longlife Ceramic-Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure | Specs, Drawings, Information Request
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| 1-3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms with Clear Aperture |
S-303 High-Speed Piezo Phase Shifter with Direct Metrology Option
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- Very High Resolution: <0.1 Nanometer Resolution
- Tripod Design, Very Stiff with 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
- Capacitive Sensor Option for Highest Linearity and Stability
- Invar Option for Highest Thermal Stability
- Aperture (Open-Loop Versions)
- Travel Range to 3 microns
- Compact Size: 30mm Dia X 10mm
PDF Brochure | Specs, Drawings, Information Request
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S-310 - S-316 Miniature Piezo Tip/Tilt + Z Scanner with Aperture |
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- Tripod Design allows Tip/Tilt and Piston Motion
- Parallel Kinematics Provides Enhanced Dynamics and Better Multi-Axis Accuracy
- 10 mm Clear Aperture
- Optical Beam Deflection to 2.4 mrad
- Piston Movement up to 12 µm (phase shifter)
- Sub-Millisecond Response, Sub-Microradian Resolution
- Open Loop (lower cost) & Closed-Loop Versions (Higher Precision)
- High-Precision Flexure Guiding System
- Longlife Ceramic-Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure |
Specs, Drawings, Information Request
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| Tip/Tilt Stages with Large Aperture |
P-541.Z Piezo Z and Tip/Tilt + Z Stages: Low Profile, 80x80mm Aperture
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- Mechanical Travel Range: 100 microns, 1 mrad Tip/Tilt
- 1- and 3-Axis Versions
- Low Profile for Easy Integration: 16.5 mm
- Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
- Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
- Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
- Combination with Long-Travel M-686 Microscopy Stages
PDF Brochure |
Specs, Drawings, Information Request
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P-518, P-528, P-558 Piezo Tip/Tilt + Z Stage: High-Dynamics with Large 66x66mm Aperture
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- 1- and 3-Axis Versions
- Closed-Loop Tilt Range 2 mrad; Z-Travel 200 µm
- Parallel Kinematics + Metrology: Faster Response + Better Multi-Axis Precision
- Frictionless, High-Precision Flexure Guiding System
- Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
- Clear Aperture 66 x 66 mm
- Capacitive Sensors for Highest Linearity
PDF Brochure |
Specs, Drawings, Information Request
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N-510 High-Force Tip/Tilt + Z Platform with PiezoMotor Drives;
Nanometer Precision for Semiconductor
& Optics Applications
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- NEXLINE® High-Force Piezo Walking Drives
- Self-Locking at Rest, No Heat Generation
- Vacuum Compatible and Non-Magnetic Designs Available
- Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
- 200 N Load
- 5 nm Incremental Sensors for High Precision + Picometer Resolution Dithering Mode
PDF Brochure |
Specs, Drawings, Information Request
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| 3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms (No Aperture)
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S-325 Piezo Tip/Tilt + Z Platform: Tripod Design for Mirrors and Optics to 25 mm (1") Diameter
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- Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
- Piston Movement up to 30 µm (for Path Length Adjustment)
- Compact Tripod Design with Coplanar Axes Eliminates Polarization Rotation
- Sub-Millisecond Responsiveness
- Closed-Loop Versions for Higher Precision
- Frictionless, High-Precision Flexure Guiding System
- Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
- Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure |
Specs, Drawings, Information Request
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S-323 Piezo Tip/Tilt + Z Platform with Capacitive Direct Metrology: High Dynamics & Stability
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- Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
- Piston Movement up to 30 µm (for Path Length Adjustment)
- Compact Tripod Design with Coplanar Axes Eliminates Polarization Rotation
- Sub-Millisecond Responsiveness
- Closed-Loop Versions for Higher Precision
- Frictionless, High-Precision Flexure Guiding System
- Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
- Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure |
Specs, Drawings, Information Request
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| 2-Axis (Orthogonal) Piezo Tip-Tilt Platforms
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S-334 Miniature Piezo Tip/Tilt-Mirror: Long Travel to 120 mrad Deflection
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- Extremely large Tilt Angle: Optical Beam Deflection
to 120 mrad (~ 6.8°)
- Coplanar Axes & Fixed Pivot Point; Eliminate Polarization Rotation
- Factory Installed Mirror (up to 12.5 mm (0.5") Diameter)
- Millisecond Response, Resolution to 0.2 µrad
- Closed-loop Position Servo-Control for High Accuracy
- Frictionless, High-Precision Flexure Guiding System
- Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
PDF Brochure |
Specs, Drawings, Information Request
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