6-Axis Nanopositioning Stages, Multi-Axis Piezo Stages

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PI's 6-Axis precision nanopositioning systems come in classical flexure-guided / planar designs and in hexapod (stewart-platform) type construction. Planar Flexure designs provide travel ranges of typically up to 1000 µm with extremely good in-plane accuracy (straightness / flatness), hexapod designs on the other hand can be scaled to much larger travel ranges. PI also provides non-magnetic multi-axis positioning systems.


PIMars 6-Axis Piezo Flexure Stage Nanopositioning System 200µm/1mrad


  • XYZ, Theta Z, Theta Y, Theta Z
  • Travel Ranges: 200 µm Linear / 1 mrad Rotation
  • Enhanced Responsiveness & Multi-Axis Precision: Parallel Kinematics / Metrology
  • Closed-Loop, Capacitive Direct Metrology for Higher Linearity and Stability
  • Frictionless, Backlash-Free Flexure Guiding System
  • Excellent Scan-Flatness
  • Longlife Lifetime PICMA® Piezo Multilayer Actuators
  • UHV Vacuum Option to 10-9 hPa

The 6-Axis PIMars piezo flexure stage is one of the most advanced nanopositioning systems in the world. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms (see E-712 digital piezo controller) make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness & flatness in the low nanometer range.


Custom systems with larger travel ranges or faster response are available on request.

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P-562 6-Axis Stage




P-587 6-Axis Piezo Flexure Nanopositioning Stage, to 800?m


6-Axis Precision Positioning Stage
  • 800 x 800 x 200 ?m Linear Range, + Rotation
  • For Surface Metrology, Scanning and Positioning in all Six Degrees of Freedom
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Closed-Loop, Direct Metrology with Capacitive Sensors for Highest Stability & Linearity
  • Longlife Lifetime PICMA? Piezo Multilayer Actuators Frictionless, High- Enhanced Responsiveness & Multi-Axis Precision: Parallel Kinematics / Metrology
  • Active Trajectory Control in All 6 Degrees of Freedom


The P-587.6CD is a unique, highly accurate, 6-axis scanning and positioning system based on piezo flexure drives. It provides a linear travel range of 800 x 800 x 200 ?m and rotation ranges of several mrad.

PDF Brochures | Specs, Drawings, Request Information





6-Axis Piezo-Hexapod, Non-Magnetic, 10mm/6°

Piezo Hexapod
  • Closed-Loop PiezoWalk Motor Drives
  • Travel Ranges 10 mm Linear, 6° Rotation
  • 202 mm (8") Clear Aperture
  • Non-Magnetic
  • Nanometer Resolution
  • Low-Profile: 140 mm Height Only
  • Parallel Kinematics for Enhanced Dynamics and Better Multi-Axis Accuracy
  • Up to 500 N Force Generation
  • Self Locking at Rest, No Heat Generation

This non-magnetic 6-axis positioner combines the advantages of the parallel-kinematic hexapod approach with the precision and stiffness of the NEXLINE® piezowalk linear motors. It can handle large loads and automatically locks the position when powered off. The piezo drives do not exhibit magnetic fields and at the same time are not affected by magnetic or electric fields.
More on Special Hexapods

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