- XYZ, Theta Z, Theta Y, Theta Z
- Travel Ranges: 200 µm Linear / 1 mrad Rotation
- Enhanced Responsiveness & Multi-Axis Precision: Parallel Kinematics / Metrology
- Closed-Loop, Capacitive Direct Metrology for Higher Linearity and Stability
- Frictionless, Backlash-Free Flexure Guiding System
- Excellent Scan-Flatness
- Longlife Lifetime PICMA® Piezo Multilayer Actuators
- UHV Vacuum Option to 10-9 hPa
The 6-Axis PIMars piezo flexure stage is one of the most advanced nanopositioning systems in the world. Its parallel-kinematic design, where all piezo flexure drives act on the same moving platform, and sophisticated digital control algorithms
(see E-712 digital piezo controller) make it possible to achieve highly precise coordinated motion in all degrees of freedom, with straightness & flatness in the low nanometer range.
Custom systems with larger travel ranges or faster response are available on request.
PDF Brochures | Specs, Drawings, Request Information
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