Nanopositioning Motors, Piezo Actuators

XYZ Stages     Single Axis Stages     6-Axis Stages     Tip/Tilt Stages


Piezo nanopositioning motors are based on different drive principles. For high force and long travel, piezo-walk type motors are recommended. These motors make use of continuous clamp/unclamp and expand/contract cycles of a number of piezo elements.

Inertia type piezo motors are compact, low cost motors with relatively low force.

Flexure-guided / motion amplified actuators provide shorter travel ranges but very high resolution and can be used for continuous scanning applications.

Ultrasonic piezo motors provide very high speed and are typically not used when nanometer level and sub-nanometer level precision is required.




PiezoWalk Linear Nanopositioning Motors / Actuators


N-381 Closed-Loop Nanopositioning Motor Actuator, Piezo Stepper

N-381 NEXact Nanopositioning Motor Actuator, Piezo Stepper
  • 30mm Travel, 10 N Force
  • Robust Monolithic PiezoWalk Drive, Ideal for Micro- and Nano-Manipulation
  • Very High Acceleration, can be used for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode (long distance); Continuously Variable, High-Dynamics Analog Mode for Picometer Resolution **
  • Self Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions



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N-310 OEM Miniature Linear Piezo Motor/Actuator


  • PiezoWalk® Linear Motor
  • Standard Travel Ranges from 20 to 125 mm
  • Compact Design
  • 0.03 nm Resolution
  • Push/Pull Force to 10N
  • Low Operating Voltage
  • Self Locking at Rest: Nanometer Stability, No Servo Dither & Heat Generation
  • Non-Magnetic & Vacuum-Compatible Working Principle



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N-310 NEXACT® OEM Miniature Linear Piezo Motor/Actuator





N-111 Closed-Loop PiezoWalk® Nanopositioning Linear Motor Actuator for OEMs

N-111 PiezoWalk® Nanopositioning Linear Motor Actuator
  • Patented PiezoWalk Drive Principle
  • To 0.025 nm Resolution
  • Closed-Loop Option
  • 10 mm Travel
  • 70 N Holding Force
  • Self Locking at Rest, No Heat Generation
  • Non-Magnetic & Vacuum-Compatible Working Principle
  • Cleanroom Compatible



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N-216 Closed-Loop PiezoWalk® High-Force Nanopositioning Motor Linear Actuator


  • Patented PiezoWalk Drive Principle
  • Closed-Loop Option
  • Cleanroom Compatible
  • Travel Range 20 mm
  • To 0.03 nm Resolution
  • Holding Force to 800N
  • Self Locking at Rest
  • Non-Magnetic & Vacuum-Compatible Working Principle



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N-216 PiezoWalk® High-Force Nanopositioning Motor Linear Actuator

Flexure-Guided Linear Nanopositioning Actuators

P-601 Closed-Loop Piezo Flexure Nanopositioning Actuator, to 400 µm

P-601 PiezoMove™ Piezo Flexure Nanopositioning Actuator
  • Travel Ranges to 400 µm
  • Zero-Friction Flexure Guidance, Ultra-Straight Motion
  • To 0.2 nm Resolution
  • High Dynamics & Stiffness
  • Custom Designs Feasible: Longer Travel / Faster Response / Non-Magnetic
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuators
  • Choice of Closed- & Open-Loop Models
  • Applications: Optics, Medical, Biotech and Microfluidics



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P-602 Closed-Loop High-Force Nanopositioning Flexure Actuator, to 1mm


  • Zero-Backlash Flexure Guidance, Ultra-Straight Motion
  • Long Travel to 1 mm, with Integrated Motion Amplifier
  • High Dynamics & Stiffness, Forces to 400 N
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuators
  • Choice of Closed- & Open-Loop Models
  • Custom Designs Feasible: Longer Travel / Faster Response / Non-Magnetic
  • Applications: Microfluidics, Adaptronics, Biotechnology



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P-602 PiezoMove High-Stiffness Flexure Nanopositioning Actuator





P-603 Closed-Loop Low Cost Piezo Flexure Nanopositioning Actuator

P-603 Low Cost Piezo Flexure Nanopositioning Actuator
  • Low Cost
  • To 500 µm Travel
  • Zero-Backlash Flexure Guidance
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuators
  • Choice of Closed- & Open-Loop Models
  • Custom Designs Feasible: Longer Travel / Faster Response / Non-Magnetic
  • Applications: Microfluidics, Adaptronics, Biotechnology



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P-853 · P-854 PiezoMike: Flexure Guided Piezoelectric Micrometer


  • Piezoelectric Travel to 25 ?m, Sub-Nanometer Resolution
  • Manual Travel to 18 mm
  • Dynamic Operation to 10 Hz



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Flexure Guided Piezoelectric Micrometer

Linear Piezo Stack Actuators with Casing, Closed-Loop Actuator

P-845 Preloaded Piezo Actuators For High Loads and Force Generation, Closed-Loop Option

P-845 Preloaded Piezo Actuators For High Loads and Force Generation
  • Outstanding Lifetime Due to PICMA® Piezo Ceramic Stacks
  • Travel Range to 90 µm
  • Forces: To 3000 N Pushing, 700 N Tensile
  • Sub-Millisecond Response, Sub-Nanometer Resolution
  • Options: Vacuum, Water-Resistant Case



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P-841 Preloaded Piezo Stack Actuators, Closed-Loop Option


  • Longlife PICMA® Ceramic Encapsulated Piezo ActuatorsCompact Case
  • Forces: 1000 N Pushing, 50 N Tensile
  • Sub-Millisecond Response, Sub-Nanometer Resolution
  • Options: Ball Tip, Vacuum



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P-841 Preloaded Piezo Stack

Linear Piezo Stack Actuators with Casing

P-882 · P-888 PICMA® Multilayer Ceramic-Encapsulated Piezo Stack Actuators

PICMA® Multilayer Ceramic-Encapsulated Piezo Stack Actuators
  • Microsecond Response, High Stiffness
  • Sub-Nanometer Resolution
  • Very Large Operating Temperature Range, High Humidity Resistance
  • Excellent Temperature Stability
  • Peak Current up to 20 A, Ideal for Dynamic Operation
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime Even Under Extreme Conditions



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PICA™ Power High Force Piezo Stack Actuators


  • Operating Temperature to 150 °C
  • High Load Capacity to 80,000 N
  • Sub-Nanometer Resolution
  • Extreme Reliability >109 Cycles
  • Microsecond Response
  • Options: UHV to 10-9 hPa, Non-Magnetic, PT1000 Temp Sensor



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PICA High Power Actuators





PICA™ Thru Piezo Stack Actuator with Aperture

PICA™ Thru Piezo Stack Actuator with Aperture
  • Very Robust Design, Extreme Reliability >109 Cycles
  • Cross Sections to 56 mm Diameter
  • Clear Aperture
  • Sub-Millisecond Response, Sub-Nanometer Resolution
  • Options: Vacuum, Variety of Shapes



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