XY Nanopositioning Stages

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Traditional precision positioning systems based on ballscrew drives or electromagnetic linear motors have improved gradually over time. However, for many of today’s applications from semicondutor manufacturing to laser technology, this traditional approach is not the answer. As the market continues to demand faster and more precise motion control systems, new technologies are required to keep pace. Until recently, the travel range of piezoelectric-based positioners was rather limited, but now progress in piezo ceramic actuator and motor design, as well as control technologies, has solved this problem and users have a wide selection of piezo based technologies to choose from.

Linear Motor and Air Bearing XY XY Stages are also available from PI.

Video: Why PI Nanopositioning Stages are Better




XY Piezo Stage with High-Stability Piezo Linear Motors, 225x85mm Travel


These long-travel XY microscope stages are equipped ultrasonic piezo motors. The self-locking property ensures significantly higher stability than conventional linear motors.

  • Closed-Loop Ultrasonic Piezo Motors provide Excellent Stability
  • Piezo-Scanner Options for Z and XY
  • High Speed to 150mm/sec
  • Travel to 225x85mm
  • Linear Encoder
  • Self-Locking at Rest
  • Compatible with PI Piezo Nanopositioning / Scanning Stages

XY Positoining Stage

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XY Nanopositioning Stage, Piezo-Flexure Guided, to 1.8mm Travel

PIHera® XY piezo positioning stages provide long travel ranges to 1.8mm, a record for piezo flexure actuated closed-loop multiaxis positioners. They are equipped with direct-metrology capacitive feedback for precision in the nanometer range.
  • To 1800 µm Scanning / Positioning Range
  • High-Precision, Cost-Efficient
  • Capacitive Sensors provide High Linearity and Resolution
  • Frictionless, High-Precision Flexure Guiding System
  • 0.02% Positioning Accuracy
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • X-, XY-, Z- and XYZ-Versions
  • Vacuum Option

XY Positoining Stage

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P-612 XY Piezo Nanopositioning Stage with Aperture, 100x100 µm, For Cost-Sensitive Applications

The P-612.2SL XY piezo positioning stage is a flexure guided compact system featuring a compact size of only 60x60x18mm and a 20x20 mm aperture. It is equipped with cost-effective strain gauge feedback sensors providing nanometer-range resolution and millisecond response time. A vertical positioner (piezo-Z stage) is available as the (P-612.ZSL).
  • 100x100 Closed-Loop Positioning / Scanning Range (130µm in Open-Loop)
  • Small Footprint 60x60mm, 20x20mm Aperture
  • Parallel-Kinematics for Enhanced Responsiveness
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • For Cost-Sensitive Applications
  • Frictionless, EDM cut Flexure Guiding System

P-612 XY Stage

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P-915K Low-Cost OEM XY Piezo Scanner for Imaging, 4x4µm

Piezo  Stage
  • Highly Cost-Efficient High Bandwidth Design
  • For Pixel Sub-Stepping, Image Resolution Enhancement
  • 4x4µm Scanning / Positioning Range
  • Compact: 40x 60x7 mm
  • Parallel Kinematics= Higher Dynamics & Accuracy

This extremely cost effective XY Piezo scanner was designed for imaging & scanning applications, pixel sub-stepping, where small amplitudes but high dynamics are required

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P-313 PicoCube™ XY(Z) High Bandwidth Piezo Stage: Picometer Precision,
No Servo Lag ideal for Scanning Probe Microscopy: 1µm


  • 20 Picometers Resolution, <1 nm Hysteresis
  • Ultra-High-Performance Scanner for AFM/SPM
  • New Drive Concept for Very High Bandwidth w/o Servo Lag
  • Compact Manipulation Tool for Bio-/Nanotechnology
  • High Resonant Frequency 11 khz (Z) 4.0 kHz (X,Y)
  • 1 µm Travel Range

The P-313 PicoCube XY/XYZ nanopositioning stage is based on a crystalline, leadfree piezoelectric material which differs from classical PZT ceramics. PicoCube features a particularly high motion linearity enabling ultra-high precision positioning without feedback sensor and closed-loop control. It is ideal for applications which combine high dynamics, small travel and high precision requirements.

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Piezo Nanopositioning P-313 Piezo XY Nanopositioning Stage




P-363 PicoCube™ XY Piezo Scanner for AFM, Scanning Probe Microscopy 5x5µm

PicoCube
  • 20 Picometers Resolution, <1 nm Hysteresis
  • Ultra-High-Performance Scanner for AFM/SPM
  • Closed-Loop with Direct Metrology Cap Sensors
  • Compact Manipulation Tool for Bio-/Nanotechnology
  • High Resonant Frequency 4.0 kHz
  • 1 µm Travel Range

The P-363 PicoCube™ XY/XYZ is a compact and rugged high-bandwidth nanopositioning stage providing ultra-high-performance in closed-loop operation. It is designed for scanning probe microscopy and nanomanipulation applications. Combining a stiff high-speed XY/XYZ piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback it is capable of 50 picometers resolution and below.

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P-713 Low Profile XY Piezo Scanner with Aperture, 20x20µm Cost-Effective OEM System with Low Profile


  • For Pixel Sub-Stepping, Image Resolution Enhancement
  • 6 mm Low Profile with Clear Aperture
  • Cost-Effective Design
  • To 20x20µm Scanning / Positioning Range
  • Parallel Kinematics = Higher Dynamics & Accuracy
  • Frictionless, EDM cut Flexure Guiding System

P-713 XY piezo positioners and scanners are cost-effective low profile flexure positioning system for high-dynamic scanning or tracking applications. They can be used for pixel sub-stepping methods for enhancing image resolution. Such tasks involve moving to specific positions in a small area (e.g. marked cells or CCD pixels) and from there following or performing motion with an amplitude of a few microns. The high stiffness allows for step & settling in the millisecond range.
Piezo Nanopositioning P-713 Nanopositioning XY Stage

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P-915K High-Dynamics XY Piezo Scanner, 15x15µm Cost-Effective OEM Stage for Imaging w/ 30x45 mm Aperture

Piezo XY Stage
  • For Pixel Sub-Stepping, Image Resolution Enhancement
  • Highest Dynamics with Direct Piezo Drive
  • Cost-Efficient Design
  • 15x15µm Scanning / Positioning Range
  • 5 N Load Capacity
  • Frictionless, EDM cut Flexure Guiding System

This XY piezo positioning system is cost-effective solution for OEM applications in the field of imaging, scanning or tracking. It provides a large aperture and is driven by the long-life PICMA piezo actuators.

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P-734 Ultra-Low Runout XY Piezo Nanopositioning Stage, 100x100 µm,
Low Bow Scanner with High-Dynamics & Clear Aperture

Piezo XY Stage

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  • Ultra-Precision Trajectory Control, for Scanning Microscopy & Surface Metrology
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Frictionless, EDM cut Flexure Guiding System
  • 100x100µm Scanning / Positioning Range
  • Capacitive Sensors for High Linearity
  • < 0.4 Nanometers Resolution
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators

P-734 low-bow XY piezo positioners boast an ultra-precise, flexure guides which confine motion to the XY plane and reduce Z-runout to less than a few nanometers. This trajectory precision is fundamental for AFM and the highest-precision surface metrology applications. Integrated parallel-metrology capacitive feedback provides accuracy and resolution in the nanometer and sub-nanometer range.




P-733 XY Piezo-Nanopositioning Stage with Aperture for Microscopy,
100x100µm, High Performance Stage Well-Suited for STED


  • 100x100µm Standard Scanning / Positioning Range; XYZ Version Available
  • Direct Drive, High-Speed Versions for Particle Tracking
  • Capacitive Sensors provide Resolution to 0.1 Nanometers
  • Parallel Kinematics for Better Multi-Axis Accuracy / Dynamics
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Frictionless, EDM cut Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • Vacuum and Non-Magnetic Versions

The P-733 XY piezo positioner comes in two versions: Long Travel (100x100µm) and a ultra-high-dynamics direct-drive version featureing 33x33µm travel. stages are fast and highly accurate nanopositioning and scanning systems. Both are equipped with parallel-metrology capacitive feedback for precision down to 0.1 nanometer. An XYZ-Version features a high-speed Z-drive that can actively compensate unwanted out-of-plane Z-motion during XY scanning motion.
XY Nano Positioner


P-733 Vacuum Compatible version
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PInano XY Piezo Scanning Stage for SR Microscopy, 200x200µm, Large Aperture for Slides and Petri Dishes

PInano XY Stage
  • 200x200µm Scanning / Positioning Range
  • Direct-Drive Version for Higher Dynamics
  • Choice of Sensors: PiezoResistive (Lower Cost) or Capacitive (Higher Performance)
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • Economical System with High Performance Controller

PI nano™ low-profile XY piezo microscope scanning stages are optimized high-resolution microscopy. They feature a low profile of 0.8 inches (20mm) for easy integration and a large aperture for Petri dishes and microscope slide holders.

3 Versions are available:
Economical, long travel (200x200µm) equipped with piezoresistive sensors. High stability, long travel (200x200µm) equipped with direct-metrology capacitive feedback. High speed, for particle tracking (70x70µm) with direct drive and piezoresistive feedback.

All versions can also be ordered for XYZ motion.

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Lowest Profile XY Nanopositioning System with 80x80mm Aperture

  • 100x100µm & 200x200µm Scanning / Positioning Range
  • Direct-Drive Option for Higher Dynamics, Tracking Applications
  • Ultra-Low Profile: 16.5 mm; Large Clear Aperture 80x80mm
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • Capacitive Parallel-Metrology Auto-Compensates Guiding Errors
  • Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators


These piezo positioning and scanning stages combine a very large aperture or 80x80 mm with an extremely low profile of 16.5 mm (0.65"). A variety of Z stages and Z-tip/tilt stages with the same footprint are also available.
Piezo XY Stage

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P-611 XY & XZ Piezo Nanopositioner Compact & Cost Effective 2-Axis Piezo System

XY Stage
  • Cost-Effective Piezo Mechanics & Controller System Solution
  • Strain Gauge Sensor Versions & Open Loop Versions
  • 120x120 µm Scanning / Positioning Range
  • Small Footprint 44x44 mm
  • Frictionless, EDM Cut Flexure Guiding System
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators
  • XYZ, X & Z Systems Available


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P-517, P-527 Multi-Axis Piezo Scanner to 200x200µm + Rot-Z, High-Dynamics & 66x66mm Aperture for Scanning Microscopes

XY Positioning Stage

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  • To 200µm Scanning / Positioning Ranges
  • Sub-Nanometer Resolution
  • Frictionless, High-Precision Flexure Guiding System
  • Capacitive Sensors for Highest Linearity
  • Parallel-Kinematics & Metrology = Better Response & Multi-Axis Precision
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators

These piezo positioning stages come in 6 different versions with linear travel ranges to 200 microns per axis and rotation to 4 mrad. The 66 x 66 mm clear aperture makes them well suited for microscopy / transmitted-light applications, optical tweezers etc. Z positioners and Tip/Tilt positioners are also available, custom versions with 6 axes have been built.




P-915K XY-Theta-Z Piezo Stage, 3 Degrees of Freedom in the XY Plane

  • 250x250 µm, 16 mrad Scanning / Positioning Ranges
  • Frictionless, High-Precision Flexure Guiding System
  • High Stiffness >1 N/µm
  • PICMA® Long Life Ceramic Encapsulated Piezo Actuators

This compact multi-axis piezo positioner provides 250x250µm of XY motion and up to 16 mrad of rotation around the Z-axis in a very compact package of only 60x60x100 mm
XY Theta Nanopositioning Stage

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P-628K Long-Travel XY Piezo Nanopositioning Stage with Nanometer Flatness, 800x800µm, Novel Active Z-Axis Design Provides Real Time Runout Compensation

Piezo XY Stage
  • Compact, Light-Weight, Long Positioning Ranges to 1000 µm
  • Ideal for Fast Autofocus Applications
  • Clear Aperture up to 29 mm Ř
  • Choice of Position Feedback Sensors: Piezoresistive (lower cost); Capacitive (higher precision)
  • Sub-Nanometer Resolution


This novel long-travel piezo positioner was designed for surface metrology and AFM applications. It is equipped with an active Z-axis that can improve flatness of travel down to the nanometer range and below over large travel ranges of 800x800 µm.

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M-545 XY Long Travel Microscope Stage with Ultrasonic Motor


Piezo Nanopositioning Stage
  • Stable Platform for P-545 PInano™ Piezo Nanopositioning Systems
  • Closed-Loop Ultrasonic Motors provide Excellent Stability
  • Self-Locking at Rest
  • 25 mm x 25 mm Travel Range
  • Low Profile for Easy Integration: 30 mm
  • For Nikon, Zeiss, Leica and Olympus Microscopes


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XYZ Stages     Single Axis Stages     6-Axis Stages     Tip/Tilt Stages