Nanopositioning Z-Stages / Z-Tip-Tilt Stages

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Piezo Z-nanopositioners are flexure guided to provide the best possible straightness with minimized rotational errors. Z-Tip-Tilt piezo positioning systems are parallel kinematic designs typically equipped with 3 or 4 drives. Strain gauge / piezoresistive position feedback sensors for cost sensitive applications and capacitive sensors for the highest precision requirements are available.


PIHera® Closed-Loop Piezo Z-Nanopositioning Flexure Stage Family, 50 to 400µm

P-620.Z PIhera Stages
  • Resolution to 0.1 Nanometer
  • Z-Positioning Range 50 to 400 µm
  • Cost-Efficient, yet High Accuracy: to 0.02%
  • Direct Capacitive Metrology
  • Zero-Backlash, High-Accuracy Flexure Guiding System
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuators
  • XYZ Combinations
  • Vacuum-Option


PIHera® piezo-z stages are compact high precision nanopositioning stages featuring travel ranges from 50µm to 400µm. They are equipped with non-contacting capacitive direct metrology feedback sensors for highest linearity and stability.


PIHera® piezo nanopositioning stages are also available as X- and XY-stages

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P-611.Z Compact Closed-Loop Piezo Z- Nanopositioning Stage


  • Compact: Footprint Only 44 x 44 mm
  • Positioning Range to 120 µm
  • Resolution to 0.2 Nanometer
  • Cost-Effective Mechanics/Electronics System Configurations
  • Zero-Backlash, High-Accuracy Flexure Guiding System
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuators
  • XYZ Combinations


These economical and compact closed-Loop piezo Z stages provide 100 µm closed-loop travel on a footprint of only 44x44mm. Equipped with ceramic-encapsulated piezo drives and a stiff, back-lash-free flexure guiding system, all P-611 piezo stages combine millisecond responsiveness, nanometer resolution and very long lifetime.

XZ and XYZ versions are also available
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P-611.Z Compact Piezo Z- Nanopositioning Stage




P-737 Closed-Loop Specimen-Focusing Piezo Z Stage, Wellplate Scanner for Biotech


P-737 PIFOC® Specimen-Focusing Z Stage
  • Up to 0.5 mm Z-Positioning Range
  • High-Speed Piezo Z-Motion
  • Nanometer Resolution
  • Large Aperture for Specimen Holders
  • Compatible with XY Manual & Motorized Stages
  • Millisecond Responsiveness
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuators

The P-737 piezo-Z stage was designed for bio-tech, microscopy and screening applications in drug discovery research. It can provide high resolution for Z-stack imaging and high speed for fast focusing. Combination with XY microscope stages (OEM manual stages as well as aftermarket motorized stages) is also possible.

The large aperture accommodates well plates or specimen holders

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PInano® Z, Piezo-Z Nanopositioning Scanner for SR-Microscopy, Closed-Loop


  • Cost-Effective Closed-Loop Design due to Piezoresistive Sensors
  • 200 µm Positioning Range, Extremely Fast Step & Settle, From 5 msec
  • Low Profile (0.8")
  • Proprietary Technology: Outstanding Lifetime Due to PICMA® Piezo Ceramic Stacks
  • Compatible w/ Leading Image Acquisition Software Package
  • USB Controller & Software Included

High-Speed, Low Profile, Optimized for Microscopy
The PInano™ Z piezo stage is optimized microscopy applications, and provides very fast step and settle and easy integration into high-resolution microscopes. A very low profile of 0.8" (20 mm), large aperture and long travel (200µm) are key features.

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PInano™ Z, Piezo-Z Nanopositioning Scanner for SR-Microscopy




P-915K Piezo Z-Objective Scanner, Low-Profile, High Frequency, 75µm Positioning Range, Closed-Loop


P915K Objective Z-Scanner.jpg
  • Very Low Profile of 15 mm
  • Aperture for W0.8 x 1/36" Microscope Objectives
  • Zero-Backlash, High-Accuracy Flexure Guiding System for Better Focus Stability and Minimized Runout
  • For High Scanning Frequencies
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuator

This low profile piezo objective scanner is an alternative to the successful P-721 / P-725 family of PIFOC® piezo Z nanopositioners.


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P-915K Vacuum Nanopositioning Stage: High-Load, High Dynamics & 273x273mm Large Aperture, Closed-Loop


  • 45 µm Vertical Positioning Range
  • Direct Capacitive Metrology for higher Precision
  • Direct Drive: High Stiffness & Dynamics
  • Vacuum Compatible up to 10-6 hPa
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuator

This custom piezo Z-stage provides a very large aperture and was designed for vacuum applications.

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High-Load Large Vacuum Stage




P-612.Z Compact, Closed-Loop Piezo Z Nanopositioning Stage


P-612 Z-Stage Compact Piezo Z Nanopositioning Stage
  • 100 µm Positioning Range
  • To 0.2 Nanometer Resolution
  • Closed-Loop Linearity 0.2%
  • Compact: Footprint 60 x 60 mm
  • Very Cost-Effective Controller/Piezomechanics Systems
  • Zero-Backlash, High-Accuracy Flexure Guiding System
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuator

These piezo Z stages are low-cost nanopositioning systems with travel ranges of 100 µm. The space-saving with a compact footprint of only 60x60 mm also offers a 20x20 mm clear aperture for light microscopy applications, etc. Equipped with PICMA® piezo drives and backlash-free flexure guiding system, the nanopositioner series provides nanometer-range resolution and millisecond response time.


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P-733.Z High-Dynamics Z-Nanopositioner / Scanner with Direct Metrology, Closed-Loop


  • 100 µm Positioning Range
  • Direct Capacitive Metrology for higher Positioning Accuracy
  • Resolution to 0.3 Nanometer, Closed-Loop
  • 50x50 mm Aperture
  • XY & XYZ Versions Also Available
  • Vacuum Option
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuator


P-733.Z high-performance piezo Z stages offer a positioning and scanning range of 100 µm with sub-nanometer resolution. They are equipped with non-contacting capacitive direct metrology feedback sensors for highest linearity and stability. Their fast settling time of less than 10 msec allows high throughput rates in automated scanning, focusing or Z-stack imaging applications.

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P-733 Z-Stage





P-541.Z Low Profile Piezo Z-Stage (16.5 mm), Closed-Loop

P-541 Low Profile Z-Stage
  • Low Profile 16.5 mm; 80 x 80 mm Clear Aperture
  • Vertical and Tip/Tilt +Z Stages
  • 100 µm Positioning Range , 1 mrad Tilt
  • Parallel-Kinematics / Metrology for Maximum Responsiveness & Multi-Axis Accuracy
  • Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • Longlife PICMA® Ceramic Encapsulated Piezo Actuator
  • Combination with Long-Travel M-686 Microscope Stages


P-541 piezo Z stages feature a very low profile and long travel. They are designed for nanopositioning, alignment, nanofocusing or metrology tasks.

A higher performance version with capacitive feedback sensors, and a lower-cost version with strain gauge sensors is available.


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PIFOC® Piezo-Z Objective Scanners, Closed-Loop


  • Compact, Light-Weight, Long Positioning Ranges to 1000 µm
  • Ideal for Fast Autofocus Applications
  • Clear Aperture up to 29 mm Ř
  • Choice of Position Feedback Sensors: Piezoresistive (lower cost); Capacitive (higher precision)
  • Sub-Nanometer Resolution


PI is the inventor of the piezo flexure guided objective focusing systems. Introduced 20 years ago, today a large variety of different models is available.


More Information

P-725 Objective Z-Scanner



Z/Tip/Tilt Scanners Click here for Z-Positioners


Piezo Tip/Tilt + Z Nanopositioning Stage High-Dynamics with Large Aperture


  • Closed-Loop Vertical / Tilt Range to 200 µm / 2 mrad (Open-Loop to 240 / 2.4)
  • Parallel Kinematics / Metrology for Enhanced Responsiveness & Multi-Axis Precision
  • Frictionless, High-Precision Flexure Guiding System
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators
  • 66 x 66 mm Aperture
  • Capacitive Direct Metrology for Highest Linearity
  • Z-Stages and Z-Tip/Tilt Versions

P-5x8 series, Tip/Tilt + Z piezo nanopositioners / scanners are piezo-flexure based devices providing motion to 240µm and 2.4 mrad with resolution to 0.5 nanometers and 50 nrad.

They are equipped with non-contacting capacitive direct metrology feedback sensors for highest linearity and stability The 66x66 mm aperture is ideal for transmitted-light applications.


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P-562 6-Axis Stage




P-541 Piezo Tip/Tilt + Z Nanopositioning Stages: 16.5 mm Height, 80x80mm Aperture, Closed-Loop

Tip/Tilt + Z Nanopositioning Stages
  • 100 µm Travel Range, 1 mrad Tilt
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • Longlife PICMA® Ceramic-Encapsulated Piezo Actuators
  • Combination with Long-Travel M-686 Microscope Stages


P-541 piezo Z stages feature a very low profile and long travel. They are designed for nanopositioning, alignment, nanofocusing or metrology tasks.

A higher performance version with capacitive feedback sensors, and a lower-cost version with strain gauge sensors is available.

Due to the low-profile design, the stages can easily be integrated in high-resolution microscopes.

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S-340 Closed-Loop Piezo Tip/Tilt-Mirror Platform, High-Dynamics, 4 mrad, for Optics to 100 mm Ř


  • To 20 nrad Resolution,
  • To 4 mrad Optical Beam Deflection
  • Differential Design: Excellent Position & Temperature Stability
  • Parallel Kinematics for Higher Precision and Dynamics
  • Single Moving Platform with Fixed Pivot Point Prevents Polarization Rotation
  • Sub-Millisecond Response
  • Closed-Loop Option for Better Linearity

S-340 tip / tilt platforms allow highly-dynamic rotations of the top platform in two orthogonal axes with a single pivot point (parallel kinematics). The systems are designed for optics with a diameter of up to 100mm and their differential drive and sensor design enables an outstanding angular stability in a wide temperature range. A number of top platforms is available to achieve an optimum thermal adaptation to different mirror materials.

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S-340 Z/Tip/Tilt Steering Mirror




S-330 High-Dynamics Piezo Tip/Tilt-Mirror Platform, Optics to 50 mm Ř, Closed-Loop


S-330 Z/Tip/Tilt Steering Mirrors
  • To 20 nrad Resolution,
  • To 20 mrad (>1°) Optical Beam Deflection
  • Stiff Direct-Drive Design for Fastest Response
  • Differential Design: Excellent Position & Temperature Stability
  • Higher Dynamics, Stability & Linearity Through Parallel-Kinematics Design
  • Closed-Loop Option for Better Linearity

S-330 piezo tip/tilt platforms are available with 3 different rotation ranges up to 10 mrad (20 mrad optical deflection). These flexure-guided, direct-driven piezoelectric platforms can provide higher accelerations than other tip/tilt platforms, enabling step response times in the sub-millisecond range.

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S-334 Fast Piezo Steering Mirror, to 120 mrad Deflection, Closed-Loop


  • Up to 120 mrad (~ 6.8°) Optical Beam Deflection with Flexure Motion Amplifier
  • Coplanar Axes & Fixed Pivot Point Eliminate Polarization Rotation
  • Factory Installed Mirror, 12.5 mm (0.5") Ř
  • Closed-Loop Resolution to 0.2 µrad, Millisecond Response
  • Frictionless, High-Precision Flexure Guiding System
  • Parallel Kinematics improves Dynamics & Multi-Axis Accuracy

S-334 piezo tip/tilt mirrors / scanners provide extremely large deflection angles in a miniaturized package. These fast steering mirror systems are based on a sophisticated parallel-kinematics design with two coplanar, orthogonal axes and a fixed pivot point.

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S-334 Z/Tip/Tilt Steering Mirror




S-325 High Dynamics Piezo Tip/Tilt + Z Platform, Closed-Loop

S-325 Z/Tip/Tilt Steering Mirror
  • To 10 mrad Optical Beam Deflection, 30 µm Z-Movement (Path Length Adjustment)
  • To 50 nrad Resolution
  • Single Moving Platform with Fixed Pivot Point Prevents Polarization Rotation
  • Sub-Millisecond Responsiveness
  • Closed-Loop Versions for Higher Precision
  • For Mirrors up to 25 mm (1") Ř
  • Frictionless, High-Precision Flexure Guiding System
  • Parallel Kinematics improves Dynamics & Multi-Axis Accuracy

The S-325 Tip/Tilt + Z platforms provide high speed and precise movement of the platform in two tilt axes as well as sub-nanometer linear resolution with sub-millisecond response. The design is based on a parallel-kinematics direct-drive piezo tripod, and they are especially optimized for industrial applications where 1.000.000.000 motion cycles have to be performed without failure or performance degradation. The systems are designed for mirrors and optics up to 25 mm in diameter and can be mounted in any orientation.

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N-510 High-Force Tip/Tilt + Z Platform with PiezoMotor Drives; Nanometer Precision for Semiconductor & Optics Applications

  • Closed-Loop NEXLINE® High-Force Piezo Walking Drives
  • Self-Locking at Rest, No Heat Generation
  • Vacuum Compatible and Non-Magnetic Designs Available
  • Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
  • 200 N Load
  • 5 nm Incremental Sensors for High Precision + Picometer Resolution Dithering Mode


This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines the advantages of piezo class precision with long travel of linear motor technology.


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N-510 High-Force Tip/Tilt + Z Platform