Piezo Z-nanopositioners (piezo z-stages) are flexure guided to provide the best possible straightness with minimized rotational errors.
Z-Tip-Tilt piezo positioning systems are parallel kinematic designs typically equipped with 3 or 4 drives. Strain gauge / piezoresistive position feedback sensors for cost sensitive applications and capacitive sensors for the highest precision requirements are available. For longer travel motion, voice coil driven Z-stages and air bearing-guided z/tip/tilt nanopositioning tables are also available.
High Performance Voice-Coil Linear Motor and Optical Linear Encoder
Adjustable Counterbalance, Integrated, up to 2.2 lbs
High Precision Crossed Roller Bearings
Many Accessories,
V-308 PIFOC® fast objective focusing nanopositioning stages are designed for nanometer precise and high speed focussing applications over several millimeters, in biotech, genome sequencing, microscopy and wafer inspection.
A-523 Air Bearing Z-Tip-Tilt Table for Nano-Precision Alignment
5mm Z-Travel, 2 Degrees Rotation around X and Y
High Force / Load
Ironless 3-phase linear motor
Nanometer and Sub-Microradian Resolution
Very Low Profile
Clean Room Compatible
Frictionless and Wear Free
Can be combined with X-Y-Theta Stage to form low Profile 6-Axis Stage
This unique Z-tip-tilt air bearing table with linear motors combines nanometer resolution, high dynamics and load capacity in a low profile design. The 3-axis nanopositioning table can be combined with another low profile X-Y-rot air bearing table to provide 6-DOP precision motion alignment applications in optics, photonics, medical engineering etc.
PIHera piezo-z stages are compact high precision nanopositioning stages featuring travel ranges from 50µm to 400µm. They are equipped with non-contacting capacitive direct metrology feedback sensors for highest linearity and stability.
PIHera piezo nanopositioning stages are also available as X- and XY-stages
These economical and compact closed-Loop piezo Z stages provide 100µm closed-loop travel on a footprint of only 44x44mm. Equipped with ceramic-encapsulated piezo drives and a stiff, back-lash-free flexure guiding system, all P-611 piezo stages combine millisecond responsiveness, nanometer resolution and very long lifetime.
The P-737 piezo-Z stage was designed for bio-tech, microscopy and screening applications in drug discovery research. It can provide high resolution for Z-stack imaging and high speed for fast focusing. Combination with XY microscope stages (OEM manual stages as well as aftermarket motorized stages) is also possible.
The large aperture accommodates well plates or specimen holders.
PInano Z, Piezo-Z Nanopositioning Scanner for SR-Microscopy, Closed-Loop
Cost-Effective Closed-Loop Design due to Piezoresistive Sensors
200µm Positioning Range, Extremely Fast Step & Settle, From 5 msec
Low Profile (0.8")
Proprietary Technology: Outstanding Lifetime Due to PICMA Piezo Ceramic Stacks
Compatible w/ Leading Image Acquisition Software Package
USB Controller & Software Included
High-Speed, Low Profile, Optimized for Microscopy
The PInano Z piezo stage is optimized microscopy applications, and provides very fast step and settle and easy integration into high-resolution microscopes. A very low profile of 0.8" (20 mm), large aperture and long travel (200µm) are key features.
These piezo Z stages are low-cost nanopositioning systems with travel ranges of 100µm. The space-saving with a compact footprint of only 60x60 mm also offers a 20x20 mm clear aperture for light microscopy applications, etc. Equipped with PICMA piezo drives and backlash-free flexure guiding system, the nanopositioner series provides nanometer-range resolution and millisecond response time.
P-733.Z high-performance piezo Z stages offer a positioning and scanning range of 100µm with sub-nanometer resolution. They are equipped with non-contacting capacitive direct metrology feedback sensors for highest linearity and stability. Their fast settling time of less than 10 msec allows high throughput rates in automated scanning, focusing or Z-stack imaging applications.
Compact, Light-Weight, Long Positioning Ranges to 1000µm
Ideal for Fast Autofocus Applications
Clear Aperture up to 29 mm
Choice of Position Feedback Sensors: Piezoresistive (lower cost); Capacitive (higher precision)
Sub-Nanometer Resolution
PI is the inventor of the piezo flexure guided objective focusing systems. Introduced 20 years ago, today a large variety of different models is available.
P-5x8 series, Tip/Tilt + Z piezo nanopositioners / scanners are piezo-flexure based devices providing motion to 240µm and 2.4 mrad with resolution to 0.5 nanometers and 50 nrad.
They are equipped with non-contacting capacitive direct metrology feedback sensors for highest linearity and stability The 66x66 mm aperture is ideal for transmitted-light applications.
S-340 Closed-Loop Piezo Tip/Tilt-Mirror Platform, High-Dynamics, 4 mrad, for Optics to 100 mm
To 20 nrad Resolution,
To 4 mrad Optical Beam Deflection
Differential Design: Excellent Position & Temperature Stability
Parallel Kinematics for Higher Precision and Dynamics
Single Moving Platform with Fixed Pivot Point Prevents Polarization Rotation
Sub-Millisecond Response
Closed-Loop Option for Better Linearity
S-340 tip / tilt platforms allow highly-dynamic rotations of the top platform in two orthogonal axes with a single pivot point (parallel kinematics). The systems are designed for optics with a diameter of up to 100mm and their differential drive and sensor design enables an outstanding angular stability in a wide temperature range. A number of top platforms is available to achieve an optimum thermal adaptation to different mirror materials.
S-330 High-Dynamics Piezo Tip/Tilt-Mirror Platform, Optics to 50 mm , Closed-Loop
To 20 nrad Resolution,
To 20 mrad (>1deg) Optical Beam Deflection
Stiff Direct-Drive Design for Fastest Response
Differential Design: Excellent Position & Temperature Stability
Higher Dynamics, Stability & Linearity Through Parallel-Kinematics Design
Closed-Loop Option for Better Linearity
S-330 piezo tip/tilt platforms are available with 3 different rotation ranges up to 10 mrad (20 mrad optical deflection). These flexure-guided, direct-driven piezoelectric platforms can provide higher accelerations than other tip/tilt platforms, enabling step response times in the sub-millisecond range.
S-335 piezo tip/tilt mirrors / scanners provide extremely large deflection angles in a miniaturized package. These fast steering mirror systems are based on a sophisticated parallel-kinematics design with two coplanar, orthogonal axes and a fixed pivot point.
The S-325 Tip/Tilt + Z platforms provide high speed and precise movement of the platform in two tilt axes as well as sub-nanometer linear resolution with sub-millisecond response. The design is based on a parallel-kinematics direct-drive piezo tripod, and they are especially optimized for industrial applications where 1.000.000.000 motion cycles have to be performed without failure or performance degradation. The systems are designed for mirrors and optics up to 25 mm in diameter and can be mounted in any orientation.
5 nm Incremental Sensors for High Precision + Picometer Resolution Dithering Mode
This high-force multi-axis stage is based on PI's patented NEXLINE® self-locking piezo motor drives. These high-precision linear drives were awarded the SEMI Technology Innovation Showcase Award. NEXLINE® technology combines the advantages of piezo class precision with long travel of linear motor technology.
XY Stages 
