Fast Steering Mirrors and Active Optics


1 Axis Platforms | 1-3 Axis Tripods | Tip/Tilt Stages | 3-Axis Platforms | 2-Axis | Systems for Astronomy & Controllers



Piezo steering mirrors are based on stiff piezo actuators driving a single-axis or mulit-axis platform. These high-resolution systems can provide response times as low as 10's of microseconds and on the upper end provide tilt angles in the 100 mrad range. Multi-axis steering mirrors are based on parallel kinematic designs with 3 actuators (tripod design) or 4 actuators (differential drive). Open-loop and closed-loop designs with different feedback sensors are available.




S-224 / S-226 Miniature Single Axis High Speed Tilt Mirror

S-224, S-226 XY Scanner Mirrors
  • Open Loop Versions (Lower Cost) and Closed-Loop Versions (Better Linearity)
  • Nanoradian Resolution
  • Extremely Fast: Microsecond Response
  • Up to 4.4 mrad Optical Beam Deflection
  • Includes BK7 Mirror
  • Zero Friction Flexure Guiding System
  • Longlife Ceramic-Encapsulated PICMA® Piezo Multilayer Actuators


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1-3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms with Clear Aperture


S-303 High-Speed Piezo Phase Shifter with Direct Metrology Option


  • Very High Resolution: <0.1 Nanometer Resolution
  • Tripod Design, Very Stiff with 25 kHz Resonant Frequency for Sub-Millisecond Dynamics
  • Capacitive Sensor Option for Highest Linearity and Stability
  • Invar Option for Highest Thermal Stability
  • Aperture (Open-Loop Versions)
  • Travel Range to 3 microns
  • Compact Size: 30mm Dia X 10mm


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S-303 Phase Shifters





S-310 - S-316 Miniature Piezo Tip/Tilt + Z Scanner with Aperture

S-313, S-316 tip-Tilt +Z Scanning Mirrors with Aperature
  • Tripod Design allows Tip/Tilt and Piston Motion
  • Parallel Kinematics Provides Enhanced Dynamics and Better Multi-Axis Accuracy
  • 10 mm Clear Aperture
  • Optical Beam Deflection to 2.4 mrad
  • Piston Movement up to 12 µm (phase shifter)
  • Sub-Millisecond Response, Sub-Microradian Resolution
  • Open Loop (lower cost) & Closed-Loop Versions (Higher Precision)
  • High-Precision Flexure Guiding System
  • Longlife Ceramic-Encapsulated PICMA® Piezo Multilayer Actuators


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Tip/Tilt Stages with Large Aperture



P-541.Z Piezo Z and Tip/Tilt + Z Stages: Low Profile, 80x80mm Aperture


  • Mechanical Travel Range: 100 microns, 1 mrad Tip/Tilt
  • 1- and 3-Axis Versions
  • Low Profile for Easy Integration: 16.5 mm
  • Parallel-Kinematics / Metrology for Enhanced Responsiveness / Multi-Axis Precision
  • Choice of Sensors: Strain Gauge (Lower Cost) or Capacitive Sensors (Higher Performance)
  • Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
  • Combination with Long-Travel M-686 Microscopy Stages


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P-541.Z Nanopositioning Stage





P-518, P-528, P-558 Piezo Tip/Tilt + Z Stage: High-Dynamics with Large 66x66mm Aperture

P-518 nanopositioning stage
  • 1- and 3-Axis Versions
  • Closed-Loop Tilt Range 2 mrad; Z-Travel 200 µm
  • Parallel Kinematics + Metrology: Faster Response + Better Multi-Axis Precision
  • Frictionless, High-Precision Flexure Guiding System
  • Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
  • Clear Aperture 66 x 66 mm
  • Capacitive Sensors for Highest Linearity


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N-510 High-Force Tip/Tilt + Z Platform with PiezoMotor Drives; Nanometer Precision for Semiconductor
& Optics Applications


  • NEXLINE® High-Force Piezo Walking Drives
  • Self-Locking at Rest, No Heat Generation
  • Vacuum Compatible and Non-Magnetic Designs Available
  • Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
  • 200 N Load
  • 5 nm Incremental Sensors for High Precision + Picometer Resolution Dithering Mode


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N-510 Z-Ring Stage




3 Axis (Tripod) Piezo Phase Shifters / Tip-Tilt Platforms (No Aperture)




S-325 Piezo Tip/Tilt + Z Platform: Tripod Design for Mirrors and Optics to 25 mm (1") Diameter

S-325 3-Axis Steering Mirror
  • Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
  • Piston Movement up to 30 µm (for Path Length Adjustment)
  • Compact Tripod Design with Coplanar Axes Eliminates Polarization Rotation
  • Sub-Millisecond Responsiveness
  • Closed-Loop Versions for Higher Precision
  • Frictionless, High-Precision Flexure Guiding System
  • Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
  • Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators


PDF Brochure | Specs, Drawings, Information Request





S-323 Piezo Tip/Tilt + Z Platform with Capacitive Direct Metrology: High Dynamics & Stability


  • Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
  • Piston Movement up to 30 µm (for Path Length Adjustment)
  • Compact Tripod Design with Coplanar Axes Eliminates Polarization Rotation
  • Sub-Millisecond Responsiveness
  • Closed-Loop Versions for Higher Precision
  • Frictionless, High-Precision Flexure Guiding System
  • Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy
  • Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators


PDF Brochure | Specs, Drawings, Information Request

S-323 3 Axis Steering Mirror




2-Axis (Orthogonal) Piezo Tip-Tilt Platforms




S-334 Miniature Piezo Tip/Tilt-Mirror: Long Travel to 120 mrad Deflection

S-334 Piezo Tip/Tilt Platform
  • Extremely large Tilt Angle: Optical Beam Deflection
    to 120 mrad (~ 6.8°)
  • Coplanar Axes & Fixed Pivot Point; Eliminate Polarization Rotation
  • Factory Installed Mirror (up to 12.5 mm (0.5") Diameter)
  • Millisecond Response, Resolution to 0.2 µrad
  • Closed-loop Position Servo-Control for High Accuracy
  • Frictionless, High-Precision Flexure Guiding System
  • Parallel Kinematics: Better Dynamics & Multi-Axis Accuracy


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S-330 Piezo Tip/Tilt-Mirror Platform: High Stiffness + High-Dynamics;
Large-Angle Piezo Platform for Fast Steering Mirrors

  • Large Angles: Optical Beam Deflection to 20 mrad (>1°)
  • Resolution to 20 nrad, Excellent Position Stability
  • Closed-Loop Versions for Better Linearity
  • Higher Dynamics, Stability & Linearity Through Parallel-Kinematics Design
  • Sub-Millisecond Response
  • For Mirrors up to 50 mm Diameter
  • Differential Design for Excellent Temperature Stability
  • Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators
PDF Brochure | Specs, Drawings, Information Request
S-330 Piezo Tip/Tilt Platform





S-340 Piezo Tip/Tilt-Mirror Platform: High-Dynamics for Optics to 100 mm (4") Dia

S-340 Piezo Tip/Tilt Platform
  • Optical Beam Deflection to 4 mrad
  • Resolution up to 20 nrad, Excellent Position Stability
  • Higher Precision and Dynamics via Parallel Kinematics
  • Single Moving Platform with a Fixed Pivot Point Prevents Polarization Rotation
  • Sub-ms Response
  • Position-Controlled Versions for Better Linearity
  • Differential Design for Excellent Temperature Stability
  • Longlife Ceramic Encapsulated PICMA® Piezo Multilayer Actuators


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Systems for Astronomy



Example: Active Tip/Tilt Mirror for the Ukirt Telescope Example: Active Tip/Tilt Mirror for the Subaru Telescope
Ukirt Steering Mirror Steering Mirror from Suburu Telescope
  • Mirror diameter: 314 mm
  • Tip/tilt range: ±500 µrad
  • Resonant frequency: 280 Hz
  • Mirror diameter: 150 mm.
  • Tip/tilt range: ±600 µrad.
  • Resonant frequency: 610 Hz




Controllers for Multi-Axis Piezo Tip/Tilt Mirrors



E-616 Controller for Fast Piezo Steering Mirrors & Platforms Flexible Multi Channel OEM Electronics with Coordinate Transformation

E-501 Modular Controllers for Steering Mirror Systems

E-616 Controller for Steering Mirrors E-501 Modular Controller for Steering Mirrors
  • Three Piezo Amplifiers Provide up to 10 W Peak Power
  • Closed-Loop
  • Internal Coordinate Transformation for Tripod Design
  • Compact and Cost-Effective Design for OEMs or Bench-Top
PDF Brochure | Specs, Drawings, Information Request
PDF Brochure




1 Axis Platforms | 1-3 Axis Tripods | Tip/Tilt Stages | 3-Axis Platforms | 2-Axis | Systems for Astronomy & Controllers